基于数据有效性切换控制回路的方法研究  

Research on the Method of Switching Control Loop Based on Data Validity

作　　者：陈沿宇 陈国兴 任妍 步石 CHEN Yanyu;CHEN Guoxing;REN Yan;BU Shi(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第6期22-25,102,共5页Equipment for Electronic Products Manufacturing

摘　　要：多自由度运动控制系统通过光学传感器测量结果来驱动垂向执行机构闭环运动,其运动过程中会出现部分光斑不可用,导致控制系统闭环失败问题。为解决此问题,增加垂向光栅尺测量系统,设计基于数据有效性的双测量系统切换控制策略,实现垂向测距系统与光栅尺测量系统自动切换,同时改变控制回路中的设定点生成轨迹,保证切换过程的控制平稳、冲击最小。通过构建仿真实例,验证了切换控制回路算法的正确性。The height and tilt of motion control system are calculated by vertical height measurement system.The motion stage drives the vertical actuator with the measurement results of the sensors,based on optical principles.During the movement,some sensors may become unusable,resulting in invalid vertical data and unstable control system.Add a vertical encoder measurement system and design a dual measurement system switching control strategy based on data validity to achieve automatic switching between the vertical height measurement system and the encoder measurement system of the motion system.At the same time,change the setpoint generation trajectory in the control loop to ensure smooth control and minimal impact during the switching process,avoiding the cross talk effect of multi-degree freedom,and greatly improving the stability of the control system.

关 键 词：运动控制 自动切换 数据有效性 控制回路 

分 类 号：TN307[电子电信—物理电子学]