矢量网络分析仪校准与程控研究  

Research on On-chip Testing Technology of RF Devices and Program Control of Vector Network Analyzer

作　　者：包敖日格乐 左宁[1] 胡奇威 张光宇 张铎 BAO Aorigele;ZUO Ning;HU Qiwei;ZHANG Guangyu;ZHANG Duo(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第6期33-40,87,共9页Equipment for Electronic Products Manufacturing

摘　　要：射频集成电路晶圆级S参数测试是射频器件制作过程中重要的工艺环节,该测试技术依赖微波探针测试系统,微波探针测试系统由矢量网络分析仪、探针、精密运动工作台、承片卡盘、机器视觉系统、测试电缆等组成。其中矢量网络分析仪是探针测试系统的测量工具,其测量精度和程控效率直接决定了该系统在片测量的准确度和工作效率。对矢量网络分析仪的工作原理、S参数物理意义、校准工艺、测量工艺做了详细地介绍,并给出了矢量网络分析仪上位机程控方法。Wafer-level S-parameter test of RF integrated circuit is an important process link in the manufacture of RF devices.The test technology relies on the microwave probe test system,which consists of vector network analyzer,probe,precision moving table,plate chuck,machine vision system,test cable,etc.The vector network analyzer is a measuring tool of the probe test system,and its measuring accuracy and program control efficiency directly determine the accuracy and efficiency of the system's on-chip measurement.In this paper,the working principle,physical meaning of S parameter,calibration process and measurement process of vector network analyzer are introduced in detail,and the program control method of host computer of vector network analyzer is given.

关 键 词：矢量网络分析仪 S参数 射频器件在片测试 微波探针测试系统 

分 类 号：TP393.06[自动化与计算机技术—计算机应用技术]