外延生长设备EFEM系统设计  

Design of EFEM System for Epitaxial Growth Equipment

作　　者：陈国钦 吴限 周立平 巴赛 CHEN Guoqin;WU Xian;ZHOU Liping;BA Sai(The 48th Research Institute of CETC,Changsha 410111,China)

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2024年第1期15-18,共4页Equipment for Electronic Products Manufacturing

摘　　要：阐述了应用于外延生长设备的EFEM系统,通过采用顶升机构、机械手和校准器等部件,结合机器视觉辅助判断方法,设计了一种外延生长设备的EFEM系统,该系统有效地提高了晶圆洁净度,提升了设备的自动化水平;并在相关机型进行应用和测试,能够可靠高效地运行。An Epitaxial growth equipment EFEM system is described in the paper.By using components such as a lifting mechanism,a robotic arm,and a calibrator,combined with machine vision assisted judgment methods,an EFEM system for epitaxial growth equipment is designed.The system effectively improves wafer cleanliness and enhances the automation level of the equipment.The system has been applied and tested on relevant types,and can run reliably and efficiently.

关 键 词：外延生长 机械手 机器视觉 半导体设备前端模块 

分 类 号：TN305.054[电子电信—物理电子学]