兆声功率密度对同轴兆声辅助喷射电沉积镍的影响  

Effect of power density of coaxial megasonic agitation on jet electrodeposition of nickel

作　　者：翟科 周丰 梁勇康 马仕豪 李腾楠 杜立群[2] ZHAI Ke;ZHOU Feng;LIANG Yongkang;MA Shihao;LI Tengnan;DU Liqun(College of Quality and Technical Supervision,Hebei University,Baoding 071002,China;State Key Laboratory of High-Performance Precision Manufacturing,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]河北大学质量技术监督学院,河北保定071002 [2]大连理工大学高性能精密制造国家重点实验室,辽宁大连116024

出　　处：《电镀与涂饰》2024年第1期1-6,共6页Electroplating & Finishing

基　　金：国家重点研发计划(2022YFB4601602);河北省自然科学基金(E2022201028)。

摘　　要：[目的]金属微器件在电沉积过程中往往会产生较大的残余应力,对微器件的尺寸精度、力学性能和良率产生不利影响。[方法]为降低镀层的残余应力,在喷射电沉积镍过程中施加同轴兆声辅助。研究了兆声功率密度对Ni镀层形貌、表面粗糙度、显微硬度和残余应力的影响。[结果]施加同轴兆声辅助后,所得Ni镀层的宏观和微观形貌都有所变差,表面粗糙度略微增大,显微硬度变化不大,但残余应力显著降低。当兆声功率密度为10 W/cm2时,Ni镀层的残余应力最低,比无兆声辅助时所得Ni镀层低了37.75%。[结论]在电沉积过程中施加兆声辅助能够有效降低镀层的残余应力。[Introduction]High residual stress is usually formed in the coatings electrodeposited on metallic microdevices,which is adverse to the dimensional accuracy,mechanical properties,and yield rate of microdevices.[Method]The jet electrodeposition of nickel was conducted under the assistance of coaxial megasonic agitation to reduce the residual stress of Ni coatings.The effect of megasonic power density on the morphology,surface roughness,microhardness,and residual stress of Ni coating was studied.[Result]The Ni coating had the following changes after adding a coaxial megasonic agitation during jet electrodeposition:a slight deterioration in appearance and surface morphology,a little increase in surface roughness,a little change in microhardness,and a great decrease in residual stress.The Ni coating electrodeposited with a megasonic power density of 10 W/cm2 featured the lowest residual stress,which is 37.7%lower than that of the one obtained without the assistance of megasonic agitation.[Conclusion]The residual stress of coating can be reduced effectively if megasonic agitation assistance is adopted during the electrodeposition process.

关 键 词：微器件 喷射电沉积 镍 残余应力 兆声辅助 功率密度 

分 类 号：TQ153.12[化学工程—电化学工业]