3英寸双面YBCO薄膜的MOCVD制备研究  

MOCVD preparation of 3-inch double-sided YBCO films

作　　者：王其琛 夏钰东 赵睿鹏 曾成 陶伯万[2] WANG Qichen;XIA Yudong;ZHAO Ruipeng;ZENG Cheng;TAO Bowan(School of Physical Science and Technology,Southwest Jiaotong University,Chengdu610031,China;Nation Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu610054,China;School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu610054,China)

机构地区：[1]西南交通大学物理科学与技术学院,四川成都610031 [2]电子科技大学电子薄膜与集成器件全国重点实验室,四川成都610054 [3]电子科技大学光电科学与工程学院,四川成都610054

出　　处：《电子元件与材料》2023年第12期1411-1415,共5页Electronic Components And Materials

基　　金：国家自然科学基金(51872040)。

摘　　要：制备大面积双面YBCO超导薄膜有助于器件集成的发展。基于自研金属有机化学气相沉积(MOCVD)系统在3英寸铝酸镧基片上制备了性能优异的YBCO超导薄膜。使用扫描电子显微镜(SEM)表征了薄膜表面形貌和厚度,结果显示薄膜双面形貌一致,薄膜表面大部分平整,有少量孔洞。双面厚度接近,分别为533 nm和565 nm。X射线衍射(XRD)测试结果表明在大面积薄膜上成分分布均匀,除了(400)-Y_(2)O_(3)和LAO基片衍射峰以外,只存在尖锐的(00l)-YBCO衍射峰,薄膜双面面外扫描半峰宽低于0.3°,面内扫描半峰宽低于0.944°且仅有四个相距90°的独立尖峰,说明薄膜沿基片外延质量好。在77 K温度下分布式临界电流密度(Jc)测试结果表明薄膜具有良好载流能力,双面Jc>2.4 MA/cm^(2),面内均匀性和双面一致性高。在77 K,10 GHz的条件下,使用蓝宝石谐振器测试得到薄膜的微波表面电阻(Rs)为0.188 mΩ。结果表明自研MOCVD系统能够制备高质量、大面积的YBCO高温超导薄膜。The preparation of large-area double-sided YBCO superconducting films contributes to the development of the device integration.In this study,a homemade metal-organic chemical vapor deposition(MOCVD)system was used to prepare high-performance YBCO superconducting films on 3-inch LaAlO_(3) substrates.Scanning electron microscope(SEM)was used to characterize the surface morphology and thickness of the films.The result indicates that the consistent double-sided morphology can be achieved with mostly smooth surfaces and few pores.The thickness of both sides is close,which is 533 nm and 565 nm,respectively.X-ray diffraction(XRD)analysis indicates uniform composition distribution across the large-area film.Besides the(400)-Y_(2)O_(3) and LAO substrate diffraction peaks,only sharp(00l)-YBCO diffraction peaks can be observed.The full-width at half-maximum(FWHM)value for out-of-plane is below 0.3°,and it is below 0.944°for in-plane,with only four independent peaks spaced at 90°,indicating good epitaxial quality of the film.Distributed critical current density(Jc)testing at 77 K demonstrates that the current-carrying capacity of the film is excellent,with double-sided Jc exceeding 2.4 MA/cm^(2) and high in-plane uniformity and double-sided consistency.At 77 K and 10 GHz,by using a sapphire resonator,the film exhibits a microwave surface resistance(Rs)value of 0.188 mΩ.The results show that the homemade MOCVD system is capable of preparing high-quality and large-area YBCO high temperature superconducting films.

关 键 词：MOCVD 铝酸镧 高温超导薄膜 YBCO 

分 类 号：O484.1[理学—固体物理]