10m长管道内壁类金刚石薄膜沉积及性能  

Deposition and Properties of DLC Film on the Inner Wall of a 10-m-Long Stainless-steel Tube

作　　者：靳朋礼 田修波[1] 巩春志[1] JIN Pengli;TIAN Xiubo;GONG Chunzhi(School of Materials Science and Engineering,Harbin Institute of Technology University,Harbin 150000,China;Songshan Lake Materials Laboratory,Dongguan 523000,China)

机构地区：[1]哈尔滨工业大学材料科学与工程学院,哈尔滨150000 [2]东莞松山湖材料实验室,东莞523000

出　　处：《中国表面工程》2023年第6期49-56,共8页China Surface Engineering

基　　金：国家自然科学基金(12075071,U2241233);黑龙江省头雁创新团队计划(HITTY-20190013);黑龙江省自然科学基金(LH2019A014)资助项目。

摘　　要：工业生产过程中管道内壁经常受到输送物质的腐蚀和磨损,对管道内壁进行涂层防护十分必要,而目前鲜有在大长径比管道内壁镀膜的报道,且缺乏对大长径比管道内壁膜层性能的研究。采用等离子体增强化学气相沉积(PECVD)技术在直径100 mm、长10 m管道内壁沉积类金刚石(DLC)薄膜,并研究管道内工作气体的等离子体放电辉光光谱、膜层表面亮度、水静态接触角、硬度、摩擦因数和拉曼光谱等。结果表明:管道内等离子体光谱显示管内等离子体中有Ar^(+)和乙炔分解成的C_(2)、H和CH;膜层表面的亮度L*最高达到37.4和色差ΔE^(*)最大1.9,膜层拉曼光谱结果表明靠近管道两端和中间位置膜层的I_(D)/I_(G)均匀,膜层水静态接触角显示靠近管道两端的膜层接触角略小;靠近管道两端膜层硬度相比中间位置的膜层硬度高,并且磨损测试中膜层均未出现破损剥落,膜层具有高的耐磨性。试验实现了在大长径比的管道内壁沉积耐磨损的DLC膜层,为长管道内壁均匀镀膜提供了理论支持和技术指导。During industrial production,the inner wall of a tube is often corroded and worn by the conveying material;therefore,it must be protected.Currently,research on the coating of the inner wall of a tube is limited,and research regarding the performance of the inner wall of a large-aspect-ratio tube is lacking.Thus,this study attempts to solve the problem of a diamond-like carbon(DLC)film on the inner wall of a long tube.Herein,the internal surface of a 304 stainless-steel tube,which is 10 m long and 100 mm in diameter,is coated with DLC using plasma-enhanced chemical vapor deposition(PECVD).The hollow cathode discharge of gas into the tube,brightness of the film,contact angle,surface hardness,friction factor,and Raman spectroscopy results are characterized using different tests.During the preparation of the inner coating,the plasma spectrum in the 300-800 band at position 3 of the pipe is analyzed using a spectrometer and optical focusing platform.After the film is prepared,its surface brightness is measured using a color difference meter to determine the L~*,a~*,and b~* values of the film,where L~* represents the brightness,a~* represents red and green,and b*represents yellow and blue.Scanning electron microscopy(SEM) is used to observe the section morphology of the film.The surface roughness of the film is measured using atomic force microscopy(AFM).A friction and wear-testing machine is used to test the wear resistance of the film.A GCr 15 ball with a diameter of 3 mm is selected as the grinding pair,and the experimental parameters of load,rotational speed,and test time are set as 3 N,200 r/min,and 120 min,respectively.A nanoindentation hardness instrument is used to measure the nanohardness of the film.A measuring meter for the static contact angle of water is used for measurement;the measurement requires 2μl of each drop.Each sample is tested three times,and the average value is calculated as the final test result.The film is measured by a laser Raman spectrometer using a 532 nm laser source from 800 to 2 000

关 键 词：等离子体增强化学气相沉积(PECVD) 长管道 内壁镀膜 类金刚石 

分 类 号：TG156[金属学及工艺—热处理] TB114[金属学及工艺—金属学]