光电效应对半导体应变片内载流子的影响  

Influence of Photoelectric Effect on Carriers in Semiconductor Strain Gauges

作　　者：刘晓东[1] 张朦丹 刘琳琳 孙航 Liu Xiaodong;Zhang Mengdan;Liu Linlin

机构地区：[1]同济大学机械与能源工程学院

出　　处：《工程机械》2024年第1期18-22,I0009,共6页Construction Machinery and Equipment

摘　　要：在使用半导体应变片式高灵敏度力传感器过程中发现,光照条件下传感器输出结果存在明显的漂移现象,且在光强发生改变时,传感器的输出电压会发生大幅度的跳动,需要一段时间才能平衡。输出电压与导电性能有关,取决于半导体应变片内载流子的变化,针对此问题,采用不同强度激光照射传感器半导体应变片的试验方法,研究光电效应对半导体应变片内载流子的影响,并探究最终输出电压平衡问题。研究结果发现,在一定光照下,输出电压平衡时间最快为2.2 s。试验结果有望推动光电调零的应用。In the process of using a semiconductor strain gauge type high-sensitivity force sensor,it is found that the output results of the sensor under lighting conditions present an obvious drift,and when the light intensity changes,the output voltage of the sensor experiences a large fluctuation,which takes a period to balance.The output voltage is related to the conductivity and depends on the change of carriers in the semiconductor strain gauge.To address this problem,a test method of irradiating the semiconductor strain gauge of the sensor with different intensities of laser is adopted to study the influence of the photoelectric effect on the carriers in the semiconductor strain gauge and to explore the final output voltage balance problem.The research results show that,under a certain illumination,the fastest time for output voltage balance is 2.2 s.The test results are expected to promote the application of photoelectric zeroing.

关 键 词：半导体应变片 光电效应 载流子 电桥平衡 

分 类 号：TN30[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]