五氧化二钒薄膜材料制备方法研究进展  

Research Progress in Preparation Methods of Vanadium Pentoxide Thin Film Materials

作　　者：杜金晶[1] 孙晔 朱军[1] 李倩[1] 王斌[1] 刘景田 孟晓荣 DU Jinjing;SUN Ye;ZHU Jun;LI Qian;WANG Bin;LIU Jingtian;MENG Xiaorong(School of Metallurgical Engineering,Xi’an University of Architecture and Technology,Xi’an 710055,China;Shaanxi Film Separation Technology Research Institute,Xi’an 710055,China)

机构地区：[1]西安建筑科技大学冶金工程学院,西安710055 [2]陕西省膜分离技术研究院,西安710055

出　　处：《材料导报》2024年第5期111-119,共9页Materials Reports

基　　金：陕西省科技厅区域创新能力引导计划(2022QFY10-05,2022QFY10-04)。

摘　　要：由于V^(5+)的饱和氧化态,五氧化二钒成为钒体系中最稳定的氧化物。作为功能材料,五氧化二钒薄膜在众多科学领域有着巨大的应用潜力,因而受到越来越多的关注。这主要归功于其特殊的层状结构、高能量密度、良好的化学和热稳定性以及优异的光学和电学性能。五氧化二钒薄膜的制备方法很多,采用不同的实验方法在不同衬底上制备的五氧化二钒薄膜因化学成分和组织结构差异而造成其电学、光学性能也存在显著的差异。本文详细阐述了五氧化二钒薄膜现有的制备技术,并对五氧化二钒薄膜材料应用的发展趋势进行了展望,以期为五氧化二钒薄膜产业的发展提供参考。Due to the saturated oxidation state of V^(5+) , vanadium pentoxide becomes the most stable oxide in the vanadium system. As a functional material, vanadium pentoxide thin film has great application potential in many scientific fields and has attracted more and more attention. This is mainly attributed to its special layered structure, high energy density, good chemical and thermal stability, and excellent optical and electrical properties. Vanadium pentoxide thin films can be prepared in many ways. Using different experimental methods, the electrical and optical properties of vanadium pentoxide thin films prepared on different substrates are also significantly different due to differences in chemical composition and organizational structure. In this paper, the existing preparation technology of vanadium pentoxide thin film is described in detail, and the development trend of vanadium pentoxide thin film material application is prospected, aiming to provide reference for the development of vanadium pentoxide thin film industry.

关 键 词：五氧化二钒薄膜 溶胶-凝胶法 溅射法 喷雾热解法 

分 类 号：TQ135.11[化学工程—无机化工]