基于扫频检测的微机械陀螺耦合误差系数辨识  

Coupling error coefficient identification based on swept-frequency measurement in MEMS gyroscopes

作　　者：郑旭东 夏陈浩 王雪同 佟文元 ZHENG Xudong;XIA Chenhao;WANG Xuetong;TONG Wenyuan(School of Aeronautics and Astronautics,Zhejiang University,Hangzhou 310007,China)

机构地区：[1]浙江大学航空航天学院,杭州310007

出　　处：《中国惯性技术学报》2024年第2期170-179,共10页Journal of Chinese Inertial Technology

基　　金：国家自然科学基金(51976177);中国浙江省基础公益研究计划(LGG20F040001)。

摘　　要：为减小微机械陀螺阻尼耦合、刚度耦合、力耦合误差的影响,提出一种基于扫频检测的微机械陀螺耦合误差系数辨识方法。首先,拓展了微机械陀螺动力学方程并建立误差模型,表明耦合误差造成陀螺输出不稳定且难以消除。其次,推导了耦合误差系数辨识方法,通过数值仿真分析了幅值、相位检测误差对辨识精度的影响,并给出不同误差系数下辨识结果的理论相对误差分布。结果表明,所提方法对耦合误差系数的辨识范围存在局限性;测量误差对辨识结果的影响不可忽略。最后,对某陀螺进行耦合误差系数辨识实验验证,结果表明:该陀螺力耦合系数、阻尼耦合系数、刚度耦合系数的辨识误差分别为0.542 ppm、6.09%、0.205 ppm;辨识曲线的拟合优度为0.99。In order to reduce the influence of damping coupling error,stiffness coupling error and force coupling error of micro electromechanical system(MEMS)gyroscopes,a coupling error coefficient identification and reliability verification method based on frequency sweep detection is provided.Firstly,the dynamic equation of the micro mechanical gyroscope is extended and an error model is established,indicating that coupling errors causes instability in the gyroscope output and is difficult to eliminate.Secondly,a coupling error coefficient identification method is derived,the impact of amplitude and phase detection errors on identification accuracy is analyzed through numerical simulation,and then,the theoretical relative error distribution of identification results under different error coefficients is given.The results indicate that the proposed method has limitations in identifying the range of coupling error coefficients,and the impact of measurement errors on identification results cannot be ignored.Finally,the coupling error coefficient of a gyroscope is verified by experiment.The results show that the identification errors of the force coupling coefficient,damping coupling coefficient,and stiffness coupling coefficient of the gyroscope are 0.542 ppm,6.09%and 0.205 ppm,respectively.The goodness of fit of the identification curve is 0.99.

关 键 词：微机械陀螺 耦合误差 系数辨识 扫频检测 

分 类 号：TH721[机械工程—仪器科学与技术]