基于MOS的CO气体传感器研究进展  

Research progress of CO gas sensor based on MOS

作　　者：马祥云 王素华 MA Xiangyun;WANG Suhua(School of Environmental Science and Engineering,North China Electric Power University,Beijing 102206,China)

机构地区：[1]华北电力大学环境科学与工程学院,北京102206

出　　处：《传感器与微系统》2024年第3期6-9,13,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(21775042);广东省石油化工污染过程与控制重点实验室开放基金资助项目(2018B030322017)。

摘　　要：实现对一氧化碳(CO)气体的现场快速监测对公众的健康有重要意义。与传统CO检测方法相比,基于金属氧化物半导体(MOS)的气体传感器具有制作方法简单、操作方便、传感性能优越和可实时监测等优点,被广泛地应用于有毒有害气体的检测。本文介绍了基于MOS材料的CO气体传感器件的传感机理及其研究现状,结合国内外的研究进展,综述了基于MOS的CO传感器传感性能的改善方法,并展望了MOS基CO气体传感器的发展方向。It is of great significance for public health to fast and in-situ monitoring on CO gas.Compared with traditional CO detection methods,metal-oxide-semiconductor(MOS)-based gas sensors are widely used in detection of toxic and harmful gases,due to its advantages of simple production method,easy operation,superior sensing performance,and can achieve real-time monitoring.Sensing mechanism and research status of CO gas sensor devices based on MOS materials are introduced.Combined with the research progress at home and abroad,the methods for improving the sensing performance of MOS-based CO sensors are reviewed,and the development direction of MOS-based CO gas sensors is prospected.

关 键 词：一氧化碳气体传感器 金属氧化物半导体 气敏性能 氧化石墨烯 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]