基于纳米铂黑材料的超高辐射率MEMS红外光源研究  

Research on MEMS infrared light source based on nano Ptblack material with ultrahigh emissivity

作　　者：树东生 陶继方 徐茂森 赵佳[1] 李炎[2] 张小水 SHU Dongsheng;TAO Jifang;XU Maosen;ZHAO Jia;LI Yan;ZHANG Xiaoshui(School of Information Science and Engineering,Shandong University,Qingdao 266000,China;Key Laboratory of Laser and Infrared System Integration Technology,Ministry of Education,Shandong University,Qingdao 266000,China;Hanwei Electronics Group Corporation,Zhengzhou 450000,China)

机构地区：[1]山东大学信息科学与工程学院,山东青岛266000 [2]山东大学激光与红外系统集成技术教育部重点实验室,山东青岛266000 [3]汉威科技集团股份有限公司,河南郑州450000

出　　处：《传感器与微系统》2024年第3期39-42,51,共5页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(SQ2019YFB200002)。

摘　　要：本文基于微机电系统(MEMS)设计和加工技术,研制了一种高辐射率、低功耗、高调制速率的MEMS红外(IR)光源,通过在工艺中引入高可靠的纳米铂黑(Pt-black)材料作为红外辐射层,在2~14μm光谱范围内成功实现了99.5%以上的平均辐射效率。在5V驱动电压下,该MEMS红外光源的辐射区温度达到407℃,响应时间(T90)为17ms,在10Hz和100Hz工作频率下的调制深度分别达到100%和42%。最后,把该MEMS红外光源芯片集成在一种微型二氧化碳(CO_(2))气体传感器样机中进行了实验验证,结果表明:该器件具备良好的辐射特性和温度特性。该MEMS红外光源可以用于常规的CO_(2)和甲烷(CH_(4))气体检测,以及二氧化硫(SO_(2))、硫化氢(H_(2)S)、六氟化硫(SF_(6))、氨气(NH_(3))等多种工业气体检测。A high emissivity,low power consumption,high modulation rate MEMS infrared(IR)light source is developed based on MEMS design and processing technology.By introducing high reliable nano platinum-black(Pt-black)material as IR emission layer,successfully achieve an ultra-high emissivity covering wavelength range from 2 to 14μm,and the average emissivity is up to 99.5%.The modulation depth is 100%at 10 Hz and 42%at 100 Hz.Under 5 V driving voltage,the radiation temperature of the MEMS IR emitter reaches 407℃and the response time(T90)is 17 ms,and the modulation depth are 100%and 42%at 10 Hz and 100 Hz operating frequencies respectively.Finally,the MEMS IR light source chip is integrated into a miniature CO_(2)gas sensor prototype by experimental verification,and the results show that the component has good radiation characteristics and temperature characteristics.This MEMS IR light source can be used for both conventional CO_(2)and CH_(4)gas detection and other industrial gas detections,e.g.SO_(2),H_(2)S,SF_(6),NH_(3).

关 键 词：微机电系统 微型红外光源 红外气体传感器 微机电系统红外光源 

分 类 号：TN212[电子电信—物理电子学]