类蛛网状盘式谐振微陀螺的抗冲击性能与结构误差仿真分析  

Simulation Analysis of Impact Resistance and Structural Error of Micro Cobweb-Like Disk Resonator Gyroscope

作　　者：樊波 郭述文[3] FAN Bo;GUO Shuwen(School of Electrical Engineering,University of South China,Hengyang 421001;Micro-Nano Sensor Technology Research Center,Soochow University,Suzhou 251001;East China Institute of Photo-Electron IC,Bengbu 233040)

机构地区：[1]南华大学电气工程学院,衡阳421001 [2]苏州大学微纳传感技术研究中心,苏州251001 [3]华东光电集成器件研究所,蚌埠233040

出　　处：《飞控与探测》2023年第5期14-22,共9页Flight Control & Detection

基　　金：国家自然科学基金(61434003);湖南省教育厅科学研究一般项目(22C0219)。

摘　　要：具有导航级潜能的盘式谐振微陀螺是国际研究最热门的一类微机械陀螺,在此基础上设计了一款频率裂解小的类蛛网状盘式谐振微陀螺。通过有限元仿真软件进行了模态分析和冲击分析,仿真结果表明,类蛛网状盘式谐振微陀螺工作模态与寄生模态最小频差为3.9kHz,可承受的冲击载荷加速度高达25000 g。此外,开展了晶向误差和工艺误差等结构误差对频率裂解影响的仿真研究,结果表明,其比圆环状盘式谐振陀螺在频率裂解上具有更低的结构误差敏感度。综上说明该结构能有效抑制寄生模态干扰、抗冲击性能强且结构误差鲁棒性好,具有较好的发展前景。The microdisk resonator gyroscope with navigation level potential is the most popular kind of micromachine gyroscope in international research.On this basis,we designed a micro cobweb-like disk resonator gyroscope with small frequency splitting.Modal analysis and impact analysis were conducted using finite element simulation software.The simulation results showed that the minimum frequency difference between the working mode and the parasitic mode of the micro cobweb-like disk resonator gyroscope was 3.9kHz,and the impact load acceleration it can withstand was up to 25000 g.In addition,simulation analysis was conducted on the influence of structural errors such as crystal orientation error and process error on frequency splitting.The results showed that it had lower structural error sensitivity than the circular disk resonator gyroscope in frequency splitting.In summary,this structure can effectively suppress parasitic mode interference,and has strong impact resistance and good structural error robustness,with preferably development foreground.

关 键 词：微机械 盘式谐振陀螺 抗冲击特性 结构误差 仿真分析 

分 类 号：TH703[机械工程—仪器科学与技术] TP212.1[机械工程—精密仪器及机械]