一种空间微型质谱仪的芯片级离子源研究  

Research on a Chip Level Ion Source for a Micro Mass Spectrometer of Spacecraft

作　　者：窦仁超[1] 崔寓淏 喻新发[1] 冯琪[1] 刘坤[2] 闫荣鑫[1] 孙立臣[1] 孟冬辉[1] DOU Ren-chao;CUI Yu-hao;YU Xin-fa;FENG Qi;LIU Kun;YAN Rong-xin;SUN Li-chen;MENG Dong-hui(Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China;School of Mechanical Engineer and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]北京卫星环境工程研究所,北京100094 [2]东北大学机械工程与自动化学院,辽宁沈阳110819

出　　处：《真空》2024年第2期42-46,共5页Vacuum

基　　金：国防科技基础加强计划技术领域基金(2022-JCJQ-JJ-0764)。

摘　　要：设计了一种空间微型质谱仪用三电极场芯片级离子源结构,该离子源由5层电极板构成气体电离区和离子引出区。采用MEMS技术制备了芯片级离子源原理样机,测试了其电子流、离子流和稳定性。结果表明:该芯片级离子源能够产生0.357 mA以上的电子流,接收到的离子流可以达到527 pA,满足空间探测任务中微小型质谱仪离子源的功能要求。A chip-level ion source structure with a triode-type field emitter is designed for the micro mass spectrometer of spacecraft,which consists of a gas ionization by electron impact and an ion extraction section.The structure of the ion source is composed of five layers of electrodes.A chip-level ion source prototype was prepared using MEMS technology,and the electron flow,ion flow and stability were tested.The results show that the chip-level ion source can generate an electron current of over 0.357 mA,and the received ion current can reach 527 pA,meeting the functional requirements of the ion source for micro mass spectrometers in space exploration missions.

关 键 词：微机电系统 离子源 深空探测 空间质谱仪 

分 类 号：TB774[一般工业技术—真空技术]