基于MEMS工艺的压电微泵的研究进展  

Research progress of piezoelectric micropumps based on MEMS technology

作　　者：李以贵 王一 LI Yigui;WANG Yi(School of Sciences,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418

出　　处：《应用技术学报》2024年第1期123-132,共10页Journal of Technology

基　　金：国家自然科学基金项目(62104151)资助。

摘　　要：在微纳米尺度流体控制的应用中,压电微泵因其简易结构,高精密度,高力密度,快速响应与良好环境适性成为研究的热点。从致动原理与流体控制方案角度对压电微泵的研究现状进行了归纳总结,介绍了其在药物供给、细胞分离、微量化学检测等领域的应用,指出了压电微泵输出功率较小、输出具有蠕变特性、成本偏高等问题,并对压电微泵的发展方向进行了展望。In the application of micro and nano scale fluid control,piezoelectric micropumps have become a research focus because of their simple structure,high precision,high force density,fast response and good environmental adaptability.The research status of piezoelectric micropump was summarized from the perspective of actuation principle and fluid control scheme,and its applications in drug supply,cell separation,micro chemical detection and other fields were introduced.The problems of low output power,creep characteristic and high cost of piezoelectric micropump were pointed out,and the development direction of piezoelectric micropump was prospected.

关 键 词：压电微泵 致动原理 流体控制方案 腔室 阀 

分 类 号：TH706[机械工程—仪器科学与技术]