硅锭线切割张力控制方法对比研究  

Comparative Study of Tension Controlmethods for Silicon Ingot Wire Cutting

作　　者：苏圣霖 罗福源[1] SU Shenglin;LUO Fuyuan(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2024年第S01期39-44,50,共7页Electromachining & Mould

摘　　要：为满足低成本、低切损、高精度、高稳定性的硅片切割要求,在分析常用的两种线切割张力控制方法优缺点的基础上,采用ADAMS软件进行了弹簧式张力控制原理的建模与动力学仿真,并基于Simulink与MFAC控制算法对电控式张力控制进行了ADAMS与MATLAB动力学联合仿真。结果表明,两种张力控制方法所得到的电极丝加速度变化曲线走势一致,电控式张力控制在快速性及精确性方面优于弹簧式张力控制,但平稳性较差。进而,提出弹簧与电控相结合的张力控制方法,并在ADAMS中完成建模与动力学仿真。结果表明,该装置可在一定程度上取长补短。In order to meet the requirements of low cost,low cutting loss,high precision and high stability of silicon wafer cutting,on the basis of analyzing the advantages and disadvantages of two commonly used wire-cutting tension control methods,ADAMS software was used to model and simulate the spring tension control principle.Based on Simulink and MFAC control algorithm,the ADAMS and MATLAB dynamics co-simulation of electronically controlled tension control was carried out.The results show that the acceleration curve of electrode wire obtained by the two tension control methods had the same trend,and the electronically controlled tension control was better than the spring tension control in terms of speed and accuracy.But the stability was poor.Therefore,a tension control method combining spring and electric control was proposed,and modeling and dynamic simulation were completed in ADAMS.The results show that the device can complement each other to a certain extent.

关 键 词：恒张力控制 ADAMS建模 MFAC控制算法 电极丝加速度 

分 类 号：TG661[金属学及工艺—金属切削加工及机床] TG174