气体流量对磁控溅射氮化镍薄膜对电极性能的影响  

Effect of Gas Flow Rate on Counter Electrode Performance of Nickel Nitride Thin Films Deposited by Magnetron Sputtering

作　　者：何万霞 时方晓[1] HE Wanxia;SHI Fangxiao(Shenyang Architectural University,Shenyang,Liaoning 110000,China)

机构地区：[1]沈阳建筑大学,辽宁沈阳110000

出　　处：《浙江化工》2024年第3期6-11,共6页Zhejiang Chemical Industry

摘　　要：目的:开发性能卓越、成本经济的对电极,优化氮化镍薄膜制备工艺。方法:使用直流磁控反应溅射技术探究气体(氮气、氩气)流量对薄膜对电极的性能及组装成染料敏化太阳能电池的光电转化效率的影响。利用X射线衍射仪分析薄膜物相组成、紫外-可见分光光度计对薄膜透光度进行分析、太阳光模拟器和数字源表测定电池的光电转换效率。结果:氮化镍薄膜为四方相Ni2N物质,在通入固定Ar流量(16 mL·min^(-1))的条件下,电池光电转换效率随N2通入量的增加而增加;在通入固定N2流量(10 mL·min^(-1))的条件下,电池光电转换效率随Ar通入量的增加而减小,未通入Ar时为最优(η=2.87%),这与Ar流量为16 mL·min^(-1)、N2流量为10 mL·min^(-1)条件下的电池光电转换效率非常接近,但制备成本更低。此时薄膜透光率接近40%,满足将其作为半透明光伏窗以实现绿色低碳建筑的要求。结论:半透明光伏窗不仅具备窗户的采光功能,还能通过光伏组件发电以降低能耗,为染料敏化太阳能电池和光伏建筑一体化技术相结合提供了可能性,具备较大的节能潜力。Objective:To optimize the preparation process of nickel nitride thin film by developing counter electrodes with excellent performance and economical cost.Methods:DC magnetron reactive sputtering technology was used to investigate the effect of gas(nitrogen,argon)flow rate on the performance of thin film counter electrodes and the photoelectric conversion efficiency of dye-sensitized solar cells assembled.The phase composition of the thin film was analyzed by X-ray diffractometer,the transmittance of the thin film was analyzed by UV visible spectrophotometer,and the photoelectric conversion efficiency of the battery was determined by solar simulator and digital source meter.Results:The nickel nitride film was a tetragonal Ni2N material.Under the condition of a fixed Ar flow rate(16 mL·min^(-1)),the photoelectric conversion efficiency of the battery increased with the increase of N2 input.Under the condition of a fixed N2 flow rate(10 mL·min^(-1)),the photoelectric conversion efficiency of the battery decreased with the increase of Ar input,and was optimal(η=2.87%)without Ar,which was very close to the photoelectric conversion efficiency of the battery under the conditions of Ar flow rate of 16 mL·min^(-1) and N2 flow rate of 10 mL·min^(-1),but with lower preparation costs.At this point,the transmittance of the thin film was close to 40%,which meet the requirement of using it as a translucent photovoltaic window to achieve green and low-carbon buildings.Conclusion:The translucent photovoltaic windows not only have the lighting function of windows,but also can generate electricity through photovoltaic modules to reduce energy consumption,which provides the possibility of combining dye-sensitized solar cells with integrated photovoltaic building technology,and has great energy-saving potential.

关 键 词：过渡金属氮化物 对电极 磁控溅射 光电转化效率 Ar流量 N2流量 

分 类 号：TM914.4[电气工程—电力电子与电力传动] TU18[建筑科学—建筑理论]