广角衍射光学元件的优化设计  

Optimal Design of Wide Angle Diffractive Optical Element

作　　者：杨亮亮[1] 刘成林[1] 赵勇兵 沈法华[1] 赵琪 刘建利 YANG Liangliang;LIU Chenglin;ZHAO Yongbing;SHEN Fahua;ZHAO Qi;LIU Jianli(Jiangsu Province Intelligent Optoelectronic Devices and Measurement-Control Engineering Research Center,School of Physics and Electronics Engineering,Yancheng Teachers University,Yancheng 224007,China)

机构地区：[1]盐城师范学院物理与电子工程学院,江苏省智能光电器件与测控工程研究中心,江苏盐城224007

出　　处：《红外技术》2024年第3期256-260,共5页Infrared Technology

基　　金：国家自然科学基金(61904158);江苏省智能光电器件与测控工程研究中心开放基金(306054014);江苏省重点研发计划-社会发展项目(BE2021685)江苏省自然科学基金面上项目(BK20201475)。

摘　　要：为进一步研究入射角度的增大对衍射光学元件(diffractive optical element,DOE)衍射效率及微结构高度等参数的影响,分析了入射角度和周期宽度对带宽积分平均衍射效率的影响。基于扩展标量衍射理论,建立了DOE的微结构高度与入射角度和周期宽度的数学模型,提出了工作在一定入射角度范围内,基于复合带宽积分平均衍射效率(comprehensive polychromatic integral diffraction efficiency,CPIDE)最大化实现设计波长和微结构高度等结构参数的优化设计方法。以工作在红外波段的DOE为例进行分析。结果表明:当相对周期宽度为20,入射角度范围为0°~40°时,该DOE的CPIDE为94.15%,微结构高度为1.3396mm。该设计方法可以实现广角DOE的优化设计。The influence of the incident angle on the diffraction efficiency and microstructure height of the diffractive optical element(DOE)was analyzed to further study the influence of the incident angle and period width on the polychromatic integral diffraction efficiency(PIDE).Based on the extended scalar diffraction theory(ESDT),a mathematical model of the relationship among the microstructure height,incident angle,and period width of the DOE was established.An optimal design method for structural parameters,such as the design wavelength and microstructure height,was proposed based on maximizing the comprehensive PIDE(CPIDE)within a certain range of incident angles.A DOE operating within the infrared waveband was considered as an example.The results indicate that when the relative period width is 20 and the incidence angle range is 0°to 40°,the CPIDE of the DOE is 94.15%,and the microstructure height is 1.3396mm.This design method can realize the optimal design of a wide-angle DOE.

关 键 词：衍射光学元件 衍射效率 微结构高度 入射角度 

分 类 号：O436[机械工程—光学工程]