酸性一价铜电镀铜的工艺及能效分析  

Energy efficiency analysis of copper electroplating employing acidic cuprous solution

作　　者：刘颖 邢希瑞 田栋[2] 夏方诠[2] 李宁 Liu Ying;Xing Xirui;Tian Dong;Xia Fangquan;Li Ning(Shandong Luqiao Group Co.,Ltd.,Jinan 250014,China;School of Chemistry and Chemical Engineering,University of Jinan,Jinan 250022,China;School of Chemistry and Chemical Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]山东省路桥集团有限公司,山东济南250014 [2]济南大学化学化工学院,山东济南250022 [3]哈尔滨工业大学化工与化学学院,黑龙江哈尔滨150001

出　　处：《电镀与精饰》2024年第4期99-105,共7页Plating & Finishing

摘　　要：针对电镀铜过程电力成本高的问题,通过极化曲线、赫尔槽试验、槽压变化以及扫描电镜等手段,分析了酸性一价铜电镀铜的电极过程及能效。通过对阴极的分析表明:优先发生亚铜离子的还原,阴极电流效率高于92%,且随阴极电流密度的增大而提高;当阴极电流密度不高于4.0 A·dm^(-2)时,镀铜层表面状态和微观形貌较为优异。通过对紫铜阳极的分析表明:优先发生铜的氧化,阳极电流效率高于94%,且随阳极电流密度的增大而提高;阳极会发生钝化,导致槽压急剧升高;当采用大阳极小阴极进行电镀时,既可以克服槽压升高的问题又可以保证阴阳极电流效率的匹配。In order to reduce the electricity consumption in copper electroplating,energy efficiency and electrochemical processes of the acidic cuprous solution were analyzed by polarization curve measurement,Hull cell test,observation of cell voltage,and scanning electron microscopy.On the cathode,Cu+is prior to be reduced.Additionally,the cathodic current efficiency is higher than 92%and increases with the cathodic current density.When the cathodic current density is not higher than 4.0 A·dm^(-2),the prepared copper films show excellent apparent condition and morphology.On the copper anode,metallic Cu is prior to be oxidized.Therefore,the anodic current efficiency is above 94%and increases with the anodic current density.Moreover,the anode will be passivated,resulting in a dramatic increase of bath voltage.However,employing a large anode and a small cathode can lower the bath voltage,and match the current efficiencies of anode and cathode.

关 键 词：电镀铜 一价铜 电流效率 钝化 槽压 

分 类 号：TQ153.14[化学工程—电化学工业]