多晶硅装置尾气回收工艺研究进展  

Research advances on tail gas recovery process for polysilicon units

作　　者：杜盼 陈锦溢 丁哲 陆平[1,3] 华超[1,3] 白芳[1,3] 王繁 DU Pan;CHEN Jin-yi;DING Zhe;LU Ping;HUA Chao;BAI Fang;WANG Fan(Key Laboratory of Green Process and Engineering,Institute of Process Engineering,Chinese Academy of Sciences,Beijing 100190,China;School of Chemical Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Innovation Research Institute for Green Process Manufacture,Chinese Academy of Sciences,Beijing 100190;Hubei Three Gorges Laboratory,Yichang 443000,China)

机构地区：[1]中国科学院过程工程研究所绿色过程与工程重点实验室,北京100190 [2]中国科学院大学化学工程学院,北京100049 [3]中国科学院绿色过程制造创新研究院,北京100190 [4]湖北三峡实验室,湖北宜昌443000

出　　处：《现代化工》2024年第4期70-74,共5页Modern Chemical Industry

基　　金：宁夏回族自治区重点研发计划(2022BFH2007);中国科学院过程工程研究所自主部署项目(QYJC-2022-010);湖北三峡实验室开放创新基金项目(SC231002)。

摘　　要：综述了改良西门子法多晶硅制备工艺及尾气回收研究现状,从回收率、回收效果及能耗等方面阐述了湿法回收、膜分离回收和干法回收3种尾气回收工艺。重点概述了多晶硅尾气干法回收工艺各个单元的研究进展,并根据现状总结了未来的研究方向。The research status of modified Siemens polysilicon production process as well as tail gas recovery is reviewed.Three kinds of tail gas recovery processes,including wet recovery,membrane separation recovery and dry recovery,are elaborated from the aspects of recovery rate,recovery effect and energy consumption.The research progress on each unit of polysilicon tail gas dry recovery process is summarized in detail,and the future research directions are predicted according to the current situation.

关 键 词：多晶硅 尾气回收 氯硅烷 膜分离 

分 类 号：TQ127.2[化学工程—无机化工]