半导体制造设备自动化作业系统设计与实现  

Design and Implementation of Automated Operation System for Semiconductor Manufacturing Equipment

作　　者：黄浩 杨勇 周时宇 HUANG Hao;YANG Yong;ZHOU Shi-yu(The 48th Research Institute of China Electronics Technology Corporation)

机构地区：[1]中国电子科技集团公司第四十八研究所

出　　处：《中国集成电路》2024年第4期82-85,93,共5页China lntegrated Circuit

摘　　要：本文针对半导体计算机集成制造系统中的设备自动化环节,设计了一套通用的设备自动化系统框架模型,并通过了实际生产验证。该框架模型包含底层通信驱动(SECS/GEM)、SML解析、基于状态机的业务逻辑控制、外围系统接口、异常处理&日志、消息总线、UI终端等模块,通过设备自动化系统的应用可以有效地解决生产线程的误操作问题、数据收集问题、大数据分析问题,通过联动生产制造环节中的各个子系统,显著地提高了生产效率及产品良率。This article proposes a universal framework model for equipment automation in semiconductor computer integrated manufacturing systems,which has been validated in practical production.This framework model includes modules such as underlying communication driver(SECS/GEM),SML parsing,state machine based business logic control,peripheral system interface,exception handling&logging,message bus,UI terminal,etc.Through the application of device automation system,it can effectively solve the problems of production thread mis-operation,data collection,and big data analysis.By linking various subsystems in the production and manufacturing process,the production efficiency and product yield is significantly improved.

关 键 词：半导体制造设备自动化 SECS/GEM 有限状态机 CIM系统 

分 类 号：TN305[电子电信—物理电子学]