基于激光溯源的纳米台阶高度标准物质研制与计量技术  

Development and Metrological Techniques of Nano-Step Height Reference Materials Based on Laser Traceability

作　　者：王琛英[1] 景蔚萱[1] 张雅馨 李伟[3] 张易军 李常胜 施玉书[3] 蒋庄德[2] WANG Chenying;JING Weixuan;ZHANG Yaxin;LI Wei;ZHANG Yijun;LI Changsheng;SHI Yushu;JIANG Zhuangde(School of Instrument Science and Technology,Xi’an Jiaotong University,Xi’an 710049,China;School of Mechanical Engineering,Xi’an Jiaotong University,Xi’an 710049,China;National Institute of Metrology,Beijing 100029,China;Electronic Materials Research Laboratory,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]西安交通大学仪器科学与技术学院,西安710049 [2]西安交通大学机械工程学院,西安710049 [3]中国计量科学研究院,北京100029 [4]西安交通大学电子材料与器件研究所,西安710049

出　　处：《计量科学与技术》2024年第2期52-59,共8页Metrology Science and Technology

基　　金：国家自然科学基金(52175434)。

摘　　要：随着半导体产业的快速发展,高精度极小尺寸三维纳米制造技术给纳米测量技术提出了更高的要求,急需开发与之相应的纳米几何量标准物质来满足这一日益迫切的需求。为实现我国纳米台阶高度标准物质的可控制备和纳米高度量值的可溯源性,我国自主研发了与国际水平相当的系列纳米台阶高度标准物质,并基于激光波长实现了米定义直接溯源,为支撑多领域技术研究,打破国外垄断,完善我国纳米几何量值传递体系,促进纳米产业的发展做出了重要贡献。通过对国内外纳米台阶高度标准物质的相关研究进行分析对比,就纳米台阶高度标准物质的研制方法及计量技术进行综述,以期为纳米台阶高度标准物质及其他类型的微纳米几何量标准物质的研究提供参考与展望。With the rapid growth of the semiconductor industry,the demand for high-precision,small-scale threedimensional nanomanufacturing techniques has increased,necessitating the development of corresponding nanogeometry reference materials.In response,China has independently developed a series of nano-step height reference materials comparable to international standards,achieving traceability to the meter definition through laser wavelength.This initiative has significantly contributed to supporting technological research across various domains,breaking foreign monopolies,enhancing China's nano-geometry value transfer system,and fostering the nano industry's growth.This paper reviews and compares domestic and international research on nano-step height reference materials,summarizing the fabrication methods and metrology techniques.It aims to provide references and insights for future research on nano-step height reference materials and other micro-and nano-geometry reference materials.

关 键 词：计量学 纳米台阶高度 标准物质 溯源性 

分 类 号：TB921[一般工业技术—计量学]