高精度面形坐标测量方法研究进展与应用  

Advances and Applications in High-Precision Surface Coordinate Measurement Methods

作　　者：刁晓飞[1] 范芯蕊 康岩辉[1] DIAO Xiaofei;FAN Xinrui;KANG Yanhui(National Institute of Metrology,Beijing 100029,China;Center of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China)

机构地区：[1]中国计量科学研究院,北京100029 [2]哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨150080

出　　处：《计量科学与技术》2024年第2期101-110,共10页Metrology Science and Technology

基　　金：国家重点研发计划NQI专项(YF-ZLJCB2222-1)。

摘　　要：随着光学元件加工技术的不断提升,复杂曲面光学元件在航空、航天、极紫外光刻等领域逐渐展露出其卓越的应用价值。全面回顾了高精度面形测量方法在复杂曲面光学元件研究中的进展和应用。重点关注通用性较高的坐标点扫描测量方法,详细介绍其发展历程和研究进展,分析讨论了不同方法的适用范围和优缺点。综合国内外先进的测量技术与方法,提出了一种基于微型干涉测头的标准非球面面形测量装置,以期解决面形测量仪器的量值统一和溯源问题,为复杂曲面的高精度测量提供了新的可行性方案。最后简要概括了复杂曲面测量领域的重点研究方向和可能的发展趋势。The rapid evolution in optical component processing technology has notably enhanced the application of complex surface optical elements in various domains,including aviation,aerospace,and extreme ultraviolet lithography.These advancements have brought revolutionary changes in optical design and present substantial challenges in processing technology due to precision requirements.Consequently,there is an increasing demand for inspecting profiles and establishing standards in the metrology of freeform optical surfaces.This paper provides an extensive review of the progress and applications of high-precision surface form measurement methods for complex surface optical components.It primarily focuses on the widely applicable coordinate point scanning measurement methods,elaborating on their historical development,research progress,applicability,advantages,and limitations.The paper synthesizes advanced domestic and international measurement techniques and proposes a novel standard aspherical surface measurement device,integrating a miniature interferometric probe.This innovation aims to address the challenges of uniformity and traceability in surface measurement instruments,providing a practical approach for high-precision measurements of complex surfaces.Additionally,the paper delineates the key research directions and potential development trends in the field of complex surface measurement,emphasizing the significance of further advancements in this area.

关 键 词：计量学 面形检测 干涉测量 坐标扫描 标准装置 检测技术 

分 类 号：TB921[一般工业技术—计量学]