一种新的大行程垂直纳米运动工作台设计与控制研究  

Design and Control of a New Long-Stroke Vertical Nano-Motion Stage

作　　者：张帆 黄强先[1] 程荣俊 张连生[1] 李红莉[1] 李瑞君[1] ZHANG Fan;HUANG Qiangxian;CHENG Rongjun;ZHANG Liansheng;LI Hongli;LI Ruijun(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei,Anhui 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《计量学报》2024年第3期318-324,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2019YFB2004901);国家自然科学基金(51875163)。

摘　　要：在大行程高精度垂直运动中,工作台的设计及稳定控制是关键因素。因此设计一种新型的具有平衡机构的工作台,以实现垂直方向上大行程纳米稳定运动。所研究工作台采用N331压电直线电机独立驱动,通过空气静态导轨悬浮,设计Z轴平衡系统降低垂直向电机驱动负载。利用步进控制方式完成大行程驱动,模拟方式实现微位移精密驱动控制。所提出的驱动与控制策略,可实现100 mm垂直方向上高精度快速精密驱动。另Z向也可实现纳米步进模式与模拟模式的复合控制。在全行程100 mm的范围内定位波动可限制在±9 nm内。通过验证实验,本运动工作台可适用于微纳米三坐标测量机、微光刻和微加工应用的驱动与控制任务。The design and stable control of the stage are key factors in large stroke high-precision vertical motion.Therefore,a novel motion stage with a balancing mechanism is proposed to achieve large stroke nano stable motion in the vertical direction.The characteristics of the stage are that the N331 piezoelectric linear motor is independently driven,suspended through the air static guide rail,and the Z-axis balance system is designed to reduce the motor driving load.A stepping mode is used to realize the large travel actuation,and an analog mode is adopted to implement micro-displacement actuation.This strategy can be used to achieve fast and precise driving of 100 mm.In addition,the Z-stage can achieve compound control of the nanostepping and analog modes.The positioning fluctuation can be limited to±9 nm within the full range of 100 mm.According to the verification experiments,the stage can be suitable for driving and control tasks in coordinate measuring machines(CMMs),microlithography,and micromachining applications.

关 键 词：几何量计量 纳米运动工作台 垂直运动 大行程 纳米步进 模拟模式 

分 类 号：TB921[一般工业技术—计量学]