触针式表面形貌测量仪探针几何特性引起的失真机理与识别方法  

Mechanism and Identification Method of Distortion Caused by the Geometry Characteristic of Probe in Contact Surface Topography Measuring Instrument

作　　者：王康 皮磊[1] 张树[1] 张诗涵 施玉书[1] WANG Kang;PI Lei;ZHANG Shu;ZHANG Shihan;SHI Yushu(National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《计量学报》2024年第3期325-331,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2021YFF0700403)。

摘　　要：触针式表面形貌测量仪广泛应用于表面粗糙度、几何形状和波纹度等参数的测量,但探针与被测表面交互时所产生的卷积效应会导致测量结果的失真。通过分析探针几何特性引起的失真机理,将失真按其特性分为典型失真和复杂失真。针对探针球形针尖和锥角复合效应引起的失真现象,提出了一种复杂失真的多模态识别方法。实验结果表明:相较于形貌测量仪单模态识别典型失真的限制,该方法可以有效识别形貌测量结果中的复杂失真,同时对测量结果提供可信度解释,为测量结果中失真数据的准确识别和还原提供新的思路。Contact surface topography measuring instruments are commonly utilized for assessing variables such as surface roughness,geometric shapes,and waviness.Nevertheless,the convolution effect produced by the probe's interaction with the test surface can result in measurement distortion.An analysis is performed on the distortion mechanism influenced by the geometric characteristics of the probe,classifying distortions based on their properties into conventional and complex distortions.In response to the distortion phenomena caused by the compound effects of a spherical probe tip and cone angles,a multimodal recognition method for complex distortion is proposed.Experimental outcomes indicate that compared to the limitations of single-mode recognition of conventional distortions by the topography measuring instrument,the proposed method could effectively identify complex distortions present in topography measurement results.Moreover,it offers a credible interpretation of the measurement results,providing a novel strategy for the accurate identification and correction of distorted data within these results.

关 键 词：几何量计量 探针 几何特性 失真 表面形貌 多模态识别 

分 类 号：TB92[一般工业技术—计量学]