光谱共焦传感器多参数高准确度校准  

Spectral Confocal Sensor Multi-Parameter High-Accuracy Calibration

作　　者：杨品澒 唐波 崔建军[2,4] 陈恺 宋佩颉 彭璐 YANG Pinhong;TANG Bo;CUI Jianjun;CHEN Kai;SONG Peijie;PENG Lu(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Gansu Academy of Metrology,Lanzhou,Gansu 730071,China;Tibet Autonomous Region Institute of Metrology and Testing,Lhasa,Xizang 850010,China;Reearch Insitute of Highway Ministry of Transport,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]甘肃省计量研究院,甘肃兰州730071 [4]西藏自治区计量测试所,西藏拉萨850010 [5]交通运输部公路科学研究院,北京100029

出　　处：《计量学报》2024年第3期412-418,共7页Acta Metrologica Sinica

基　　金：西藏自治区科技计划项目(XZ202301YD0004C);中国计量科学研究院科研项目(AKYZD2307,AKYZZ2204)。

摘　　要：针对高准确度光谱共焦传感器缺乏相应校准装置及方法的问题,提出了一种基于激光干涉测量的校准方法,并研制了相应的校准装置。一方面,提出了一种波长倍数间隔测量法,通过位移反馈控制将位移间隔设置为激光波长的整数倍,以减小激光干涉仪非线性误差对测量的影响;另一方面,提出了测点修正算法,消除了受检点处位移标准值因校准装置定位准确度限制不重合对测量的影响。实验结果表明:在0~100μm的测量范围内,示值误差为±23 nm,重复性为5 nm,示值误差测量结果的扩展不确定度U_(2)=7.0 nm(k=2)。构建的校准装置在0~50 mm的测量范围内的示值误差测量结果不确定度为U_(1)=3.0 nm+2×10^(-7)L(k=2)。Aiming at the problem of lack of calibration device and method for high accuracy spectral confocal sensor,a calibration method based on laser interferometry is proposed and the corresponding calibration device is developed.On the one hand,a wavelength multiples interval measurement method is proposed,by displacement feedback control,the displacement interval is set as an integer multiple of the laser wavelength,so as to reduce the influence of nonlinear error of laser interferometer on measurement.On the other hand,the measuring point correction algorithm is proposed to eliminate the influence of the displacement standard value on the measurement due to the limitation of the positioning accuracy of the calibration device.Experimental results demonstrate that within the measurement range of 0~100 μm,the indication error is ±23 nm,repeatability is 5 nm,and the expanded uncertainty of the indication error measurement results is U_(2)=7.0 nm(k=2).The uncertainty of indication error measurement results for the constructed calibration device within the measurement range of 0~50 mm is U_(1)=3.0 nm+2×10^(-7)L(k=2).

关 键 词：几何量计量 光谱共焦传感器 干涉仪非线性 测点修正算法 测量不确定度 

分 类 号：TB921[一般工业技术—计量学]