基于白光干涉的光学透镜表面瑕疵检测  

Detection of surface defects in optical lenses based on white light interference

作　　者：杨经裕 林绍莹 王卫华 陈建玲 杨洪钦 Jingyu Yang;Shaoying Lin;Weihua Wang;Jianling Chen;Hongqin Yang(College of Photonic and Electronic Engineering,Fujian Provincial Key Laboratory of Photonics Technology,Fujian Normal University,Fuzhou 350117,China;Fuzhou Huayou Optical Instrument Co.,LTD.,Fuzhou 350117,China)

机构地区：[1]福建师范大学光电与信息工程学院,福建省光子技术重点实验室,福州350117 [2]福州华友光学仪器有限公司,福州350117

出　　处：《福光技术》2023年第2期50-56,共7页FUJIAN OPTICAL TECHNOLOGY

摘　　要：白光干涉在光学系统成像质量评价和光学元器件质量监控中扮演重要角色。相移干涉法通过测量光波的相位差获取被测透镜表面的形貌信息。本研究基于相移干涉原理,设计并实现了一套白光干涉检测系统,系统主要包括显微干涉光路、机械支撑、运动结构以及数据获取与处理。最后利用光学薄透镜对系统的性能进行测试,验证了系统的检测范围与测量精度。结果表明,基于白光干涉的相移干涉法适用于光学元器件表面的瑕疵质量监测。White light interferometry plays an important role in the evaluation of imaging quality of optical systems and quality monitoring of optical components.Phase-shift interferometry obtains the topographic information of the measured lens surface by measuring the phase difference of light waves.In this study,based on the principle of phase-shift interferometry,a white light interferometric detec-tion system is designed and realized,which mainly includes the micro-interferometric optical path,mechanical support,motion structure,and data acquisition and processing.Finally,the performance of the system is tested using an optical thin lens to verify the detection range and measurement accuracy of the system.The results show that the phase-shift interferometry based on white light interference is suitable for defect quality monitoring on the surface of optical components.

关 键 词：光学透镜 表面瑕疵 白光干涉 移相干涉 

分 类 号：O43[机械工程—光学工程]