基于V90伺服的机器人夹具在掩膜版行业的应用  

Application of V90 Servo as Robot Fixture in Mask Plate Industry

作　　者：许鹏亮 熊启龙 XU Pengliang(Hefei Qingyi Optoelectronics Co.,Ltd.,Hefei 230011,China)

机构地区：[1]合肥清溢光电有限公司,安徽合肥230011 [2]不详

出　　处：《电子工业专用设备》2024年第2期12-19,共8页Equipment for Electronic Products Manufacturing

摘　　要：设计并实现了一种新型掩膜版机器人夹具,并将其成功应用于光刻掩膜版(Photomask)制造车间自动化产线中。该新型夹具采用了以Simens V90伺服作为夹具执行机构的解决方案,同时为了满足对无尘车间高洁净度的要求和对产品安全性保护,夹具采用整体封装设计,选用2个伺服电机分别驱动夹具的上夹爪和下夹爪。下卡爪B伺服电机采用Speed的模式,实现绝对位置控制;上卡爪A的伺服电机采用EPOS模式,实现力矩保护控制。方案设计、安装和使用结果表明该夹具稳定可靠,实现了对不同规格的MASK产品的高度兼容,在保证产品安全抓取的同时也能最大化地减少产品接触面积,从而减少对产品的污染,满足对无尘车间高洁净度和对产品安全性抓取转运的需求。A new Photomask robot fixture is designed and implemented,and successfully applied in the automatic production line of photomask manufacturing workshop.The new fixture adopts Simens V90 servo as the solution of the fixture actuator.At the same time,in order to meet the requirements of high cleanliness of the dust-free workshop and product safety protection,the fixture adopts the whole package design,and chooses two servo motors to drive the upper jaw and the lower jaw of the fixture respectively.Lower jaw B servo motor adopts Speed mode to realize absolute position control;EPOS mode is adopted in the servo motor of the upper clamp claw A to realize torque protection control.Scheme design,installation and use results show that the fixture is stable and reliable,to achieve a high degree of compatibility with different specifications of MASK products,to ensure product safety grasp at the same time can also maximize the reduction of product contact area,so as to reduce the pollution of the product,to meet the clean workshop high cleanliness and product safety grasp and transport needs.

关 键 词：掩膜版 V90伺服 西门子1500PLC 机器人夹具 

分 类 号：TN305.7[电子电信—物理电子学]