低频小型化兰姆波谐振器的研究  

Research on Low-Frequency Miniaturized Lamb Wave Resonator

作　　者：叶昶裕 肖强 陈正林 董加和[2] 米佳[2] 鲍景富[1] YE Changyu;XIAO Qiang;CHEN Zhenglin;DONG Jiahe;MI Jia;BAO Jingfu(University of Electronic science and Technology of China,School of Integrated Circuit Science and Engineering,Chengdu 611731,China;The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]电子科技大学集成电路科学与工程学院,四川成都611731 [2]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2024年第2期174-178,183,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(U1430102)。

摘　　要：针对低频声学器件的小型化、大带宽问题,该文基于Y切-铌酸锂压电薄膜激发了反对称A0兰姆波模式,并采用有限元法对A0模式进行了结构设计与理论分析。研究了铌酸锂切型、电极材料、金属化比及膜层厚度变化对声速和机电耦合系数等性能的影响。结果表明,特定结构下,与常规声表面波相比,A0模式兰姆波声速较小,机电耦合系数较大,有利于低频声学滤波器小型化设计。通过研究不同结构对谐振器A0模式兰姆波的横向模态的影响,实现了杂波抑制。In pursuit of overcoming challenges hindering the miniaturization of low-frequency acoustic devices with extensive bandwidth,this study investigated the excitation of the antisymmetric A0 Lamb wave mode utilizing a Y-cut lithium niobate piezoelectric film.The finite element method was then used to examine the structural design and conduct a theoretical analysis of the A0 mode.An assessment of various factors including lithium niobate cutting type,electrode material,metallization ratio,and film thickness variations on the acoustic velocity and electromechanical coupling coefficient revealed that the A0 mode Lamb wave exhibiteda lower acoustic velocity and larger electromechanical coupling coefficient compared to the conventional surface acoustic wave within a specific structure.This characteristic is advantageous for the miniaturization of low-frequency acoustic filters.Furthermore,we investigated the impact of different structures on the transverse mode of the resonator A0 mode Lamb wave to achieve clutter suppression.

关 键 词：低频小型化 谐振器 兰姆波 铌酸锂 横向模态抑制 

分 类 号：TN64[电子电信—电路与系统]