基于超表面的宽带太赫兹热释电探测器设计  

Design of wideband terahertz pyroelectric detector based on metasurface

作　　者：张明 张俊垚 张娜娇 董朋 王保柱[1] 尚燕[1] 段磊 ZHANG Ming;ZHANG Junyao;ZHANG Najiao;DONG Peng;WANG Baozhu;SHANG Yan;DUAN Lei(School of Mechanical Engineering,Hebei University of Science and Technology,Shijiazhuang,Hebei 050018,China;Hebei Bowei Integrated Circuits Company Limited,Shijiazhuang,Hebei 050200,China)

机构地区：[1]河北科技大学信息科学与工程学院,河北石家庄050018 [2]河北博威集成电路有限公司,河北石家庄050200

出　　处：《河北科技大学学报》2024年第2期141-149,共9页Journal of Hebei University of Science and Technology

基　　金：国家自然科学基金(62105093);河北省教育厅科学研究项目(BJK2023036);河北科技大学引进人才科研启动基金(1181382)。

摘　　要：为了解决传统太赫兹(THz)探测器吸收效率低,频率范围小的问题,提出将双层超表面吸收阵列结构与钽酸锂热释电探测器相贴合,构成宽带太赫兹超表面热释电探测器。采用MATLAB和CST联合仿真的优化方法对超表面结构进行按需优化;使用ANSYS对热释电探测器进行仿真分析,得到敏感层、绝热层等特征参数对太赫兹热释电探测器的温度变化率以及响应电流的影响。结果表明,采用超表面阵列结构提高了全THz波段的探测性能,凳型热释电探测器在给定条件下的平均热释电电流输出为31.52 pA。使用超表面作为吸收结构可以使热释电探测器具有连续且高效的吸波特性,为宽带太赫兹探测器的设计提供参考。In order to solve the problems of low absorption efficiency and small frequency range of traditional terahertz(THz)detectors,a broadband terahertz metasurface pyroelectric detector was proposed by combining a dual metasurface absorption array structure with the LiTaO_(3) pyroelectric detector.The optimization method of MATLAB and CST co-simulation was used to optimize the metasurface structure on demand.ANSYS was used to simulate and analyze the pyroelectric detector,and the influence of characteristic parameters such as sensitive layer and adiabatic layer on the temperature change rate and response current of terahertz pyroelectric detector was obtained.The results show that the use of metasurface array structure improves the detection performance of the whole THz band,and the average pyroelectric current output of the stool-type pyroelectric detector under given conditions is 31.52 pA.The use of metasurface as an absorption structure can make the pyroelectric detector have continuous and efficient wave absorption characteristics,which provides some reference for the design of broadband terahertz detectors.

关 键 词：半导体物理学 热释电探测器 超表面 太赫兹 联合仿真 遗传算法 

分 类 号：O441.4[理学—电磁学]