复合梁结构小型六维力传感器的优化设计  

Optimized Design of Small-scale Six-Dimensional Force Sensor with Composite Beam Structure

作　　者：孙逸文 陈希良 谢正宇 SUN Yiwen;CHEN Xiliang;Xie Zhengyu(School of Mechanical Engineering,Zhejiang Sci-Tech University;School of Intelligent Manufacturing,Taizhou University)

机构地区：[1]浙江理工大学机械工程学院 [2]台州学院智能制造学院

出　　处：《仪表技术与传感器》2024年第3期21-28,共8页Instrument Technique and Sensor

摘　　要：文中设计了一种三横梁与三竖梁复合的六维力传感器弹性体结构,使其外径缩小至40 mm,整个传感器装配完成后外径为45 mm。首先基于有限元技术分析了其在各种载荷条件下的应变分布,根据应变分布特性,设计了传感器的惠斯登电桥方案,推导了每个方向的输出电压公式。在此基础上,基于Box-Behnken响应面法开展弹性体结构的优化,以弹性体上应变片贴片位置的平均应变作为优化目标,通过多目标遗传算法得到最优设计参数,F_(x)、F_(y)、F_(z)、M_(x)、M_(y)、M_(z) 6个方向的平均应变分别是优化前的1.5833、1.5632、1.7338、1.5113、1.5109、2.171倍。进行样机制作,完成标定实验,使用最小二乘法求得解耦矩阵,通过解耦矩阵求得传感器的Ι类误差分别为0.18%、0.42%、0.41%、0.05%、0.49%、0.6%,ΙΙ类误差最大值为1.665%,精度高,维间耦合小,验证了该结构的可行性。A six-dimensional force sensor elastic body structure with a composite configuration of three horizontal beams and three vertical beams was designed.The outer diameter of the sensor was reduced to 40 mm,and after complete assembly,the final outer diameter was 45 mm.Finite element analysis was conducted under various load conditions to investigate the strain distribution.Based on the strain distribution characteristics,a Wheatstone bridge scheme for the sensor was designed,and the output voltage formulas for each direction were derived.On this basis,the Box-Behnken response surface method was employed to optimize the elastic body structure.The average strain on the strain gauges attached to the elastomer was chosen as the optimization objective.The optimal design parameters were obtained using a multi-objective genetic algorithm,resulting in the average strains in the F_(x),F_(y),F_(z),M_(x),M_(y),and M_(z) directions being 1.5833,1.5632,1.7338,1.5113,1.5109,and 2.171 times their respective values before optimization.A prototype was fabricated,and calibration experiments were conducted.The decoupling matrix was obtained using the least squares method.The first-class errors of the sensor were determined as 0.18%,0.42%,0.41%,0.05%,0.49%,and 0.6%,respectively,while the maximum second-class error was 1.665%.The sensor demonstrates high accuracy,minimal cross-coupling,and the feasibility of the proposed structure is verified.

关 键 词：六维力传感器 复合梁结构 结构参数优化 响应面法 最小二乘法 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]