平行平板光学参数的快速高精度测量方法  

Fast and High-Precision Measurement Method of Optical Parameters of Parallel Flat Plates

作　　者：钱宇 郭仁慧[1] 蒋金威 薛亮 刘杨 李建欣[1] Qian Yu;Guo Renhui;Jiang Jinwei;Xue Liang;Liu Yang;Li Jiangxin(School of Electronic and Optical Engineering,Nanjing University of Science&Technology,Nanjing 210094,Jiangsu,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学学报》2024年第3期115-128,共14页Acta Optica Sinica

基　　金：国家自然科学基金(62171225,U2031131,6197507)。

摘　　要：提出一种基于特征多项式的波长移相干涉测量方法。首先,将该方法与两步绝对测量法结合,对多表面干涉技术进行理论研究;然后,以特征图和特征多项式理论为基础设计出一种加权多步波长移相算法,用于对平板的表面面形、光学厚度变化以及光学均匀性信息进行提取计算,并通过移相算法的评价函数及其傅里叶表达式展示了算法对误差的抗扰度;最后,将该算法与OPL算法进行对比。结果表明,所提方法在不同厚度平行平板光学均匀性的测量上具有速度快、精度高的优势。Objective As an important part of optical materials,optical transmission materials are widely employed in optical display and optical communication,and their optical properties play a key role in the whole optical system.The optical properties of optical transmission materials mainly include optical uniformity,optical thickness,surface shape,fringes,and bubbles.The optical parallel plate is strictly controlled by its design parameters.If the optical uniformity,optical thickness,surface shape,and other optical parameters of the plate are inconsistent,the optical wave front will be changed when the light wave passes through,thus degrading the optical system performance.Therefore,the optical uniformity,thickness,and surface shape of optical materials are significant performance indicators for high-precision optical systems.To solve the problem of slow speed,low efficiency,and small measurement range of optical parameters of parallel plates with different thicknesses,we propose a wavelength phase-shifting interferometry method based on characteristic polynomial.Methods This method combines the two-step absolute measurement method to carry out theoretical research on multisurface interference technology.Then we design a weighted multi-step wavelength shift algorithm based on the feature map and feature polynomial theory,which is employed to extract and calculate the surface shape,optical thickness changes,and optical uniformity information of the plate.The specific process is as follows.The evaluation function and Fourier expression of the phase-shifting algorithm show the immunity of the algorithm to the errors.Finally,the algorithm is compared with the OPL algorithm.Firstly,the two-step absolute measurement method is combined with the theoretical research on multi-surface interference technology.Then a weighted multi-step wavelength phase-shifting algorithm is designed based on the feature map and feature polynomial theory,which is adopted to extract and calculate the surface shape,thickness changes,and optical unif

关 键 词：测量 波长移相 特征多项式 光学均匀性 

分 类 号：O436[机械工程—光学工程]