基于单质量块微纳光栅泰伯效应的双轴MOEMS加速度计  

Bi-Axis MOEMS Accelerometer Based on Talbot Effect of Micro/Nano-Grating with Proof Mass

作　　者：杜艺鑫 金丽 解琨阳[2,3] 吴倩楠 李孟委[1,2] Du Yixin;Jin Li;Xie Kunyang;Wu Qiannan;Li Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Innovation and Entrepreneurship,North University of China,Taiyuan 030051,China;School of Semiconductor and Physics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学创新创业学院,太原030051 [4]中北大学半导体与物理学院,太原030051

出　　处：《微纳电子技术》2024年第4期98-104,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62005253)。

摘　　要：对一种基于单质量块微纳光栅泰伯效应双轴微光机电系统(MOEMS)加速度计进行了设计、加工与测试。利用有限元分析和时域有限差分法分别对双轴加速度计的敏感结构和光栅参数进行仿真优化。在保证加速度计高集成度的同时,为了实现双轴加速度的高精度测量,采用不同周期的两组光栅进行双轴加速度检测,通过磁控溅射工艺将两组光栅结构沉积在质量块的不同区域,最终通过阳极键合方式实现该双轴MOEMS加速度计的制备。实验结果表明,光栅泰伯效应双轴MOEMS加速度计x轴与y轴的灵敏度分别为3.36和3.54 V/g,零偏稳定性分别为25.53和20.91μg@1 s。该研究为实现高精度多轴加速度计提供了一种新的方法。A bi-axis micro-opto-electro-mechanical system(MOEMS)accelerometer based on Talbot effect of micro/nano-gratings with a proof mass was designed,fabricated and tested.The sensitive structure and grating parameters of the bi-axis acceleration sensor were simulated and optimized by finite element analysis and finite difference time domain method,respectively.To achieve high-precision measurement of the bi-axis acceleration while ensuring high integration of the accelerometer,two sets of gratings with different periods were used for bi-axis acceleration detection.Two sets of grating structures were deposited in different areas of the proof mass by sputtering process.Finally,the bi-axis MOEMS accelerometer was fabricated by anode bonding.The experimental results show that the x-axis and y-axis sensitivities of the bi-axis grating MOEMS accelerometer based on Talbot effect are 3.36 and 3.54 V/g,while the zero-bias stabilities are 25.53 and 20.91μg@1 s,respectively.The research provides a new approach to achieve high-precision multi-axis accelerometers.

关 键 词：微光机电系统(MOEMS) 双轴MOEMS加速度计 泰伯效应 微纳光栅 阳极键合 

分 类 号：TH824.4[机械工程—仪器科学与技术] TH703[机械工程—精密仪器及机械]