微纳光栅MOEMS加速度计优化设计与测试  

Optimization Design and Testing of Micro-Opto-Electro-Mechanical System(MOEMS)Accelerometer with Micro-Nano Grating

作　　者：王策 张晓玉 金丽 解琨阳[2,3] 贾鑫瑞 张鹏 李孟委 Wang Ce;Zhang Xiaoyu;Jin Li;Xie Kunyang;Jia Xinrui;Zhang Peng;Li Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Innovation and Entrepreneurship,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学创新与创业学院,太原030051

出　　处：《微纳电子技术》2024年第4期114-120,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62005253)。

摘　　要：提出了一种基于微纳光栅泰伯效应的微光机电系统(MOEMS)加速度计,通过Comsol软件对加速度计结构和光栅结构参数进行优化,使其在20g量程范围内获得较大的结构灵敏度和衍射效应灵敏度,同时通过仿真分析了该结构的交叉轴串扰情况。由于受外界温度起伏影响,双层光栅结构间距受热膨胀系数的影响产生相对位移。为了减小由于温度起伏对光栅加速度计零偏的影响,采用温度闭环反馈控制技术将加速度计温度变化控制在±10 mK范围内。经实验测试,加速度计零偏稳定性达3.7μg,相较于无温控情况提升了近7倍。最终实现光栅MOEMS加速度计的灵敏度达5.23 V/g,线性相关系数为99.9%,分辨率达286.8μg。A micro-opto-electro-mechanical system(MOEMS)accelerometer based on Talbot effect of micro-nano grating was proposed.The accelerometer structure and grating structure parameters were optimized by Comsol software,which enables higher structural sensitivity and optical diffraction effect sensitivity in the range of 20g.At the same time,the cross-axis crosstalk of the structure was analyzed by simulation.Due to the effect of the external temperature fluctuations,the distance of the double-layer grating structure was affected by the thermal expansion coefficient,and the relative displacement occurs.To mitigate the impact of the temperature fluctuations on the bias stability of grating accelerometer,the temperature closedloop feedback control technique was employed to control the temperature change of the accelerometer within±10 mK.Experimental results indicate that the bias stability of the accelerometer can be reached to 3.7μg,which is nearly 7 times superior to the case of without temperature control.Finally,the sensitivity of grating MOEMS accelerometer is 5.23 V/g,the linear correlation coefficient is 99.9%,and the resolution is 286.8μg.

关 键 词：微光机电系统(MOEMS) 光栅加速度计 泰伯效应 温度闭环反馈控制 零偏稳定性 

分 类 号：TH824.4[机械工程—仪器科学与技术] TH703[机械工程—精密仪器及机械]