高精度磁栅式隧道磁阻微位移传感器  

High-Precision Tunnel Magneto-Resistive Micro-Displacement Sensor Based on a Magnetic Grid Structure

作　　者：李旺 解琨阳 金丽 景宁[2,3] 钟毓杰[1,2] 李孟委 Li Wang;Xie Kunyang;Jin Li;Jing Ning;Zhong Yujie;Li Mengwei(School of Instrumentation and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学信息与通信工程学院,太原030051

出　　处：《微纳电子技术》2024年第4期121-127,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62005253)。

摘　　要：利用隧道磁阻(TMR)效应设计了一种结构相对简单的磁栅式高精度微位移传感器。首先,介绍了磁栅式隧道磁阻位移传感器检测原理,凭借隧道磁阻传感器高灵敏度的特点检测磁栅敏感轴上方的空间磁场,接着利用COMSOL有限元仿真软件对磁栅结构进行仿真设计,验证了磁栅的磁场分布特性。通过搭建四桥路检测电路能够使TMR传感器有效抑制外部磁场干扰以及温度对TMR传感器的影响;得益于90°移相电路模块的加入,得到两路相位相差90°的标准正余弦信号,解决了传统的由于空间非正交引起的相位和幅值等误差问题,为超高倍数的细分插值技术奠定了基础,最后结合细分因子为9600的插值电路,理论上可实现208 nm的高分辨率位移检测,在20 mm量程范围内能达到0.15%的位移测量精度。Based on the tunnel magneto-resistance(TMR)effect,a relatively simple magnetic gratingtype high-precision micro-displacement sensor was designed.Firstly,the displacement detection principle of the magnetic grid-type tunnel magneto-resistance displacement sensor was introduced,and the high sensitivity of the tunnel magneto-resistance sensor was utilized to detect the magnetic field of the magnetic grid in the space above the sensitive axis,and then the magnetic field distribution characteristics of the magnetic grid were verified by using the COMSOL finite element simulation software to simulate the design of the magnetic grid structure.By building a four-bridge detection circuit,the TMR sensor can effectively suppress the external magnetic field interference and the influence of temperature on the TMR sensor;Thanks to the addition of the 90°phase-shift circuit module,two standard sine-cosine signals with a 90°phase difference were obtained,which solves the traditional phase and amplitude errors caused by spatial non-orthogonality,and lays a foundation for ultra-high multiple subdivision interpolation technology.Finally,combined with an interpolation circuit with a subdivision factor of 9600,it can theoretically achieve high-resolution displacement detection at 208 nm and a displacement measurement accuracy of 0.15%within a range of 20 mm.

关 键 词：微位移传感器 隧道磁阻 磁栅 细分插值电路 高分辨率位移检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]