基于非均匀快速傅里叶变换的抗振动白光干涉测量方法  

Anti-Vibration White Light Interferometry Based on Non-Uniform Fast Fourier Transform

作　　者：薛亮 郭仁慧[1] 刘杨 钱宇 蒋金威 李建欣[1] Xue Liang;Guo Renhui;Liu Yang;Qian Yu;Jiang Jinwei;Li Jianxin(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学学报》2024年第4期196-206,共11页Acta Optica Sinica

基　　金：国家自然科学基金(62171225,U2031131,61975079);中国博士后基金(2023M731684,2023M731752)。

摘　　要：由于白光干涉测量技术易受环境振动而产生干扰,提出了一种基于非均匀快速傅里叶变换(NUFFT)的抗振动白光干涉测量方法。该方法将白光干涉测量光路分为两个成像通道,首先通过准单色光干涉图求解移相间隔,通过移相间隔以及NUFFT算法对白光干涉图进行校正,最后利用校正的白光干涉图和七步移相算法复原出待测物体的三维形貌,实验结果表明,所提方法具有良好的抗振动性能。Objective Laser inertial confinement nuclear fusion is significant for explosion simulation,astrophysics,and other research.Meanwhile,the target pellet as a fuel container in fusion requires extremely high precision in surface morphology,and since any small morphological defect on its surface may cause asymmetric compression and experimental failure,the measurement of target surface morphology is essential.However,during the actual measurement of the surface morphology of the target pellet,the measurement results are susceptible to vibration,such as ambient light changes and optical platform vibration,which will introduce random errors to cause inaccurate measurement results.Therefore,it is of practical significance to correct the random errors during the measurement and improve the vibration resistance of the target shot.The non-uniform fast Fourier transform(NUFFT)algorithm can correct non-uniform interference signals,which is characterized by high accuracy and low hardware cost.Thus,based on the NUFFT algorithm,we propose an anti-vibration white light interferometry method.Specifically,the white light interferometry optical path adopts dual imaging channels and the main channel collects the white light interferogram.The secondary channel collects the quasimonochromatic optical interferogram,calculates the phase shift interval of the vibration according to the quasimonochromatic light interferogram,and corrects the white light interference signals collected in the vibration environment according to the obtained phase-shifting interval combined with the NUFFT algorithm to obtain a more accurate white light interference signal.According to the corrected white light interference signal combined with the seven-step phase-shifting method,the three-dimensional topography information of the object to be measured is restored.Additionally,the algorithm can be adopted for correcting non-uniform interference signals with random phase shift interval in random vibration conditions.Methods First,the Fourier transform algorit

关 键 词：测量 形貌测量 白光干涉 抗振动 非均匀快速傅里叶变换 

分 类 号：O436[机械工程—光学工程]