探测器阵列高精度二维标定平台控制系统设计  

Design of high-precision two-dimensional calibration platform control system for detector array

作　　者：于龙昆 李智祥 温小辉 刘辉[2,3] 谭逢富[3] YU Longkun;LI Zhixiang;WEN Xiaohui;LIU Hui;TAN Fengfu(School of Advanced Manufacturing,Nanchang University,Nanchang 330031,China;School of Information Engineering,Nanchang University,Nanchang 330031,China;Key Laboratory of Atmospheric Optics,Anhui Institute of Optics and Fine Mechanics,HFIPS,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]南昌大学先进制造学院,江西南昌330031 [2]南昌大学信息工程学院,江西南昌330031 [3]中国科学院合肥物质科学研究院安徽光学精密机械研究所,中国科学院大气光学重点实验室,安徽合肥230031

出　　处：《量子电子学报》2024年第2期300-309,共10页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金(42165007)。

摘　　要：为了实现快速、高精度探测器阵列标定,对探测器阵列高精度二维标定平台控制系统进行了研究,设计了采用单片机控制步进电机加编码器的闭环位移控制系统。介绍了该平台的标定原理和硬、软件控制系统设计,并对控制PID算法进行了研究,最后搭建了标定系统对控制系统进行综合测试。实验结果表明该控制系统有良好的控制能力,平台在600 mm×600 mm的有效行程内定位精度可达-11~12μm,十次单点测试数据变异系数为0.13%,连续模式下平均测量误差为1.65%。该平台设计满足探测器阵列的标定要求,为探测器阵列标定提供了一种有效手段。In order to realize fast and high-precision calibration of detector array,the control system of high-precision two-dimensional calibration platform for detector array is studied,and a closed-loop displacement control system using a single chip computer to control stepping motor and encoder is designed in this work.Firstly,the calibration principle of the platform and the design of hardware and software control system are introduced,then the control PID algorithm is studied.Finally,a calibration system is built to test the designed control system comprehensively.The experimental results show that the control system has good control ability.The positioning accuracy of the platform can reach-11~12μm within the effective itinerary of 600 mm×600 mm.The variation coefficient of ten single point test data is 0.13%,and the average measurement error in continuous mode is 1.65%,indicating that the designed platform meets the calibration requirements of detector array and provides an effective means for the calibration of detector array.

关 键 词：控制工程 探测器阵列标定 二维平台 闭环控制系统 步进电机 PID算法 

分 类 号：TH74[机械工程—光学工程]