光伏镀膜玻璃膜层的扫描电镜成像分析  

Study on the imaging conditions of photovoltaic coated glass film by SEM

作　　者：黄艳萍 黄文浩 孙晓洋 Huang Yanping;Huang Wenhao;Sun Xiaoyang(Wuxi Institute of Inspection Testing and Certification,National Center of Inspection on Solar Photovoltaic Products Quality,Wuxi 214028,China)

机构地区：[1]无锡市检验检测认证研究院,国家太阳能光伏产品质量检验检测中心,无锡214028

出　　处：《分析仪器》2024年第2期33-37,共5页Analytical Instrumentation

基　　金：江苏省市场监督管理局科技计划项目基金(KJ2022025);无锡市检验检测认证研究院院级课题(2023JYKJ014)。

摘　　要：光伏镀膜玻璃膜层结构和膜层厚度直接影响光伏镀膜玻璃的透光率及耐环境老化等各项性能,准确有效地观察和分析镀膜层微观形貌对光伏镀膜玻璃产品性能评价及失效机理研究至关重要。但由于镀膜玻璃膜层为不导电的纳米级厚度多孔膜层,在高电压下稳定性较差,不能容易地利用扫描电镜观察其形貌。本实验研究了光伏镀膜玻璃不导电固体膜层样品的表面及横截面在高放大倍数下微观形貌分析的方法,对比分析了导电处理时间、加速电压、像散和探头选择等因素对扫描电镜成像的影响,并形成了较理想的测试参数。研究结果显示,光伏镀膜玻璃不导电的固体膜层在利用扫描电镜观察微观形貌时,宜采用较短的导电处理时间和较低的加速电压,调节像散后使用Inlens探头可获得较清晰准确的成像。The structure and thickness of photovoltaic coated glass film directly affect the light transmittance and environmental aging resistance of photovoltaic coated glass.It is very important to observe and analyze the microstructure of the coating layer accurately and effectively for the performance evaluation and failure mechanism of photovoltaic coated glass products.However,due to the fact that the coated glass films are non-conductive nano-thick porous films and have poor stability under high voltage,it is not easy to observe its morphology by scanning electron microscopy.In this test,the method of micro-morphology analysis of the surface and cross-section of non-conductive photovoltaic coated glass film under high magnification is studied.The effects of conductive treatment time,acceleration voltage,astigmatism and probe selection on scanning electron microscopy imaging are compared and analyzed,and ideal test parameters are formed.The results show that when the non-conductive solid film samples are observed by scanning electron microscopy,shorter conductive treatment time and lower acceleration voltage should be used.After adjusting the astigmatism,the Inlens probe can obtain clearer and more accurate imaging.

关 键 词：光伏镀膜玻璃 膜层 扫描电镜 微观形貌分析 

分 类 号：TQ171.1[化学工程—玻璃工业]