光学元件磁流变加工不确定度误差工艺方法  

Uncertainty error technology for magnetorheological finishing of optical elements

作　　者：高博 范斌[1,3] 王佳 吴湘[1,2,3,4] 辛强 Gao Bo;Fan Bin;Wang Jia;Wu Xiang;Xin Qiang(National Key Laboratory of Optical Field Manipulation Science and Technology,Chengdu 610209,China;Advanced Manufacturing Center of Optics,Chinese Academy of Sciences,Chengdu 610209,China;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]光场调控科学技术全国重点实验室,四川成都610209 [2]中国科学院先进光学研制中心,四川成都610209 [3]中国科学院光电技术研究所,四川成都610209 [4]中国科学院大学,北京100049

出　　处：《红外与激光工程》2024年第3期203-212,共10页Infrared and Laser Engineering

基　　金：国家重点研发计划项目(2021YFC2202101)。

摘　　要：为减少磁流变抛光过程中误差对加工精度的影响,实现光学元件磁流变高精度加工,采用一种不确定度误差工艺方法对加工中的误差进行抑制。通过对磁流变加工过程中的位置误差和去除函数误差进行不确定度分析,在理论分析与实验分析的基础上进行验证实验。由仿真与实验结果可知,加工中面形误差与中频误差均存在3.5 nm的不确定度误差值,通过验证实验,得到了加工后的面形误差RMS值为20 nm,中频误差RMS值为14 nm。结果表明,采用误差不确定度的方法可优化加工工艺流程,减少误差对加工过程的影响,可以达到不确定度下的面形精度。该方法为磁流变高精度确定性加工以及面形误差与中频误差的抑制问题提供了一种解决方案。Objective As a new optical machining technology,magnetorheological finishing has many advantages,such as high machining certainty,stable convergence efficiency,controllable edge effect,small subsurface damage layer,so it has a wide range of applications in the field of high-precision optical machining.According to the principle of magnetorheological finishing,high-precision machining process requires stable removal function and accurate dwell time distribution of each dwell point.However,the actual machining process is often affected by various kinds of errors,which makes the actual machining results deviate from the ideal results.In the field of highprecision machining,small errors will also have a great impact on the surface accuracy and the errors of each frequency band,and even lead to the non-convergence of the surface errors.With its continuous development,aspherical optics have the advantages of correcting aberrations,improving image quality and reducing system weight,so it has been widely used.However,the surface of aspherical optical components is complicated,and the manufacturing process is more difficult than that of spherical optical components.In the existing research,the machining of aspherical optical elements by magnetorheological finishing is realized through the cyclic process of inspection and machining,but there are problems such as the uncertainty of surface accuracy and the uncontrollable mid-spatial error.Methods The processing method based on uncertainty error can increase the certainty of the processing process,optimize the process flow,and effectively suppress the mid-spatial error.Therefore,in order to realize the highprecision machining of optical elements,the uncertainty error method is adopted,and the ideal surface accuracy can be obtained in the actual machining process.The feasibility of the scheme is verified by simulation processing,experimental verification and error compensation on the aspherical surface.Results and Discussions The magnetorheological finishing experiment of#B i

关 键 词：光学加工 面形误差 磁流变抛光 中频误差 

分 类 号：TH161[机械工程—机械制造及自动化]