用于FBG解调的AWG芯片的设计、仿真与制备  

Design,Simulation and Fabrication of AWG Chip for FBG Demodulation

作　　者：李姝锋 袁配 黎婷 李丙祥 许然 杨奕瑶 祝连庆[1,2] LI Shufeng;YUAN Pei;LI Ting;LI Bingxiang;XU Ran;YANG Yiyao;ZHU Lianqing(Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science&Technology University,Beijing 100192,CHN;Beijing Laboratory of Optical Fiber Sensing and System,Beijing Information Science&Technology University,Beijing 100016,CHN)

机构地区：[1]北京信息科技大学光电测试技术及仪器教育部重点实验室,北京100016 [2]北京信息科技大学光纤传感与系统北京实验室,北京100016

出　　处：《半导体光电》2024年第1期69-73,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(62205030);北京市教育委员会科学研究计划项目(KM202211232019)。

摘　　要：设计、仿真并制备了一种用于光纤布拉格光栅(FBG)解调的阵列波导光栅(AWG)芯片。该芯片基于SOI衬底进行制备,并在AWG的输入/输出波导、阵列波导与平板波导之间采用双刻蚀结构进行优化。经仿真,该AWG的插入损耗为1.5 dB,串扰小于-20 dB,3 dB带宽为1.5 nm。优化后的AWG芯片采用深紫外光刻技术、电感耦合等离子体等技术制备。经测试,该AWG的插入损耗为3 dB,串扰小于-20 dB,3 dB带宽为2.3 nm。搭建了基于该AWG的解调系统,解调实验结果表明,该系统在0.8 nm范围内的解调精度可达11.26 pm,波长分辨率为6 pm。The miniaturized fiber Bragg grating(FBG) demodulation system is a hot research topic in the field of fiber optics sensing.The development of photonic integration technology has given rise to a series of compact FBG demodulation devices.Arrayed waveguide gratings(AWGs) serve as the core components in photonic integrated demodulation systems.Their spectral characteristics have a significant impact on the demodulation performance of photonic integrated FBG demodulation systems.In this study,we designed,simulated,and fabricated an arrayed waveguide grating(AWG) based on a silicon on insulator(SOI) substrate.Test results indicate that this AWG has an on-chip insertion loss of 3 dB,crosstalk of less than-20 dB,and a 3 dB bandwidth of 2.3 nm.We constructed a demodulation system based on this AWG,and experimental results show that the system achieves a demodulation accuracy of 34.2 pm within a 0.8 nm range,with a wavelength resolution of 6 pm.

关 键 词：阵列波导光栅 绝缘体上硅 光纤传感 光纤光栅解调系统 光子集成 

分 类 号：TN256[电子电信—物理电子学]