铜金属表面制备类金刚石薄膜及其力学性能与腐蚀性能的研究  

Study on Preparation of Diamond-like Carbon Film on Copper Metal Surface and Its Mechanical Properties and Corrosion Properties

作　　者：马会中[1] 丁后文 张兰[1] MA Huizhong;DING Houwen;ZHANG Lan(School of Mechanics and Safety Engineering,Zhengzhou University,Zhengzhou 450000,China)

机构地区：[1]郑州大学力学与安全工程学院,河南郑州450000

出　　处：《热加工工艺》2024年第2期86-89,96,共5页Hot Working Technology

基　　金：中原院士基金项目(2019-12-01)。

摘　　要：采用厚度0.025 cm纯铜金属箔片为基体,甲烷作为碳源,氢气为工作辅助气体,通过RF-PECVD法,改变射频功率制备类金刚石薄膜(DLC)涂层,研究了射频功率对镀DLC薄膜铜金属微观形貌、硬度、摩擦系数和弹性模量的影响。通过SEM、EDS、拉曼光谱、AFM原子力显微镜进行微观表征。采用弹性模量测试仪、旋转摩擦测试仪、显微硬度计对镀DLC薄膜的铜金属进行研究。结果表明,射频功率为200 W时DLC薄膜存在且均匀分散在纯铜基底的表面。镀DLC薄膜的铜金属弹性模量最大为75 GPa,平均摩擦系数最低为0.11,显微硬度最大达到15.4 GPa。200 W射频功率下镀DLC薄膜铜金属腐蚀电位为-0.178 V,比纯铜金属提高了25.8%,腐蚀电流密度为1.429×10^(-8)A·cm^(-2),相比于纯铜金属降低了近一半。Using pure copper foil with the thickness of 0.025 cm as the substrate,methane as the carbon source,and hydrogen as the working auxiliary gas,the diamond-like carbon film(DLC)was prepared by RF-PECVD method with the change of radio frequency power.The influence of RF power on the copper metal microscopic morphology,hardness,friction coefficient and elastic modulus of DLC film was studied.The microscopic characterization was carried out by SEM,EDS,Raman spectroscopy and AFM atomic force microscope.Using elastic modulus tester,rotating friction tester and microhardness tester,the DLC film was studied.The results show that the DLC film exists and evenly disperses on the surface of the pure copper substrate when the RF power is 200 W.The maximum elastic modulus of DLC-coated copper metal is 75 GPa,the minimum average friction coefficient is 0.11 and the maximum microhardness is 15.4 GPa.The corrosion potential of copper metal coated with DLC film under 200W radio frequency power is-0.178 V,which is 25.8%higher than that of pure copper metal,and the corrosion current density is 1.429×10^(-8) A·cm^(-2),which is nearly half lower than that of pure copper metal.

关 键 词：铜金属 RF-PECVD 射频功率 力学性能 耐腐蚀性能 

分 类 号：TG174.45[金属学及工艺—金属表面处理] TG174.36[金属学及工艺—金属学]