基于低碳绿色环保背景的微纳结构光刻纸工艺开发  

Development Of Micro-Nano Structured Lithography Paper Process Based On Low-CarbonAnd Green Environmental Protection Background

作　　者：陈洋 张琳 Chen Yang;Zhang Lin(SVG(Yancheng)Optoelectronics Technology Co.,Ltd.)

机构地区：[1]苏大维格(盐城)光电科技有限公司

出　　处：《包装前沿》2024年第2期10-12,共3页PACKAGING FOREFRONT

摘　　要：本文介绍了一种可实现微纳结构光刻纸全流程绿色制造的全固态转印绿色工艺,解决微纳结构光刻纸传统生产过程中存在的工艺复杂、能耗高、碳排放高等问题,实现低碳绿色环保目标。ln this paper,an all-solid-state transfer green process can realize the whole process of green manufacturing of micro-nano structured lithography paper,solve the problems of complex process,high energy consumption and high carbon emission in the traditional production process of micro-nano structured lithography paper,and achieve the goal of low-carbon green environmental protection.

关 键 词：微纳结构 绿色工艺 绿色制造 碳排放 低碳绿色 光刻 全流程 

分 类 号：F42[经济管理—产业经济]