基于碳纳米管电子源的高稳定电离真空计的性能研究  

Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source

作　　者：阴怡媛 李得天[1] 张虎忠[1] 马卓娅 习振华[1] 李刚[1] 张开旭 宋云见 YIN Yiyuan;LI Detian;ZHANG Huzhong;MA Zhuoya;XI Zhenhua;LI Gang;ZHANG Kaixu;SONG Yunjian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空科学与技术学报》2024年第4期312-317,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(62171208);国家重点研发计划项目(2023YFF0717200)。

摘　　要：文章将碳纳米管电子源应用于高稳定电离真空计,通过结构和电参数优化,研制了样机,并开展了样机计量特性的实验研究,研究结果表明,新型电离规在6.87×10^(-6)Pa~6.45×10^(-5)Pa的压力范围内,灵敏度在0.200 Pa^(-1)~0.245 Pa^(-1)的范围内波动,与仿真灵敏度0.250 Pa^(-1)的偏差最大为20%,灵敏度波动小于5.96%,证明该结构设计合理,有望应用于超高真空校准及精确测量领域。In this paper,a carbon nanotube electron source is applied to a highly stable ionization gauge,and a preliminary performance experimental study of the prototype is carried out.The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa^(-1)~0.245 Pa^(-1)from 6.87×10^(-6)Pa to 6.45×10^(-5)Pa,with a maximum deviation of 20%from the simulated sensitivity of 0.250 Pa^(-1),and the sensitivity fluctuation is less than5.96%,which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.

关 键 词：碳纳米管电子源 电离真空计 灵敏度 

分 类 号：TB772.3[一般工业技术—真空技术]