基于白光干涉的三维表面形貌拼接方法研究  

Research on Three-dimensional Surface to Pography Splicing Method Based on White Light Interference

作　　者：任瑛 黄育争 魏长胜 申展 刘颖刚[1] REN Ying;HUANG Yuzheng;WEI Changsheng;SHEN Zhan;LIU Yinggang(Shaanxi Provincial Oil and Gas Resource Fiber Optic Detection Engineering Research Center and Shaanxi Provincial Key Laboratory of Oil and Gas Well Measurement and Control Technology,Xi'an Shiyou University,Xi'an,China;Xi'an AcroBeam Optoelectronics Co,Ltd.,Xi'an,China)

机构地区：[1]西安石油大学陕西省油气资源光纤探测工程研究中心和陕西省油气井测控技术重点实验室,西安 [2]西安昂科光电有限公司,西安

出　　处：《光电技术应用》2024年第2期44-50,共7页Electro-Optic Technology Application

摘　　要：白光干涉测量技术由于具有非接触、无损伤、量程大、精度高和灵敏度高等特点,被应用于微纳米结构三维表面形貌测量中,但存在受限于显微物镜视场限制测量范围问题。提出了一种可以有效提高测量范围的三维表面形貌拼接方法。通过对多次采集的小范围高分辨率白光干涉图样进行域划分,采用三维形貌数据拼接配准方法,利用模板匹配算法对图像的二值化矩阵进行匹配计算,实现了待测元件的表面形貌的有效表征。研究发现,当采用不同的图像拼接方式即上下拼接、左右拼接和2&2拼接方式时,图像拼接效果有一定差异,其准确度和产生的误差不同。三种拼接方式中,2&2拼接方式能够有效减小操作误差,实现大范围和高分辨干涉图样拼接,在白光干涉三维形貌表征中具有广阔应用前景。White light interferometry has been applied to micro and nano structure 3D surface topography measurement due to its non-contact,non-damage,large range,high precision and high sensitivity.However,the measurement range is limited by the microscopic objective field.A 3D surface topography splicing method is proposed which can effectively improve the measurement range.Through the domain division of small range and high resolution white light interference pattern collected for many times,the three-dimensional topography data registration method is adopted,and the template matching algorithm is used to match the binary matrix of the image,and the surface topography of the components to be measured is effectively characterized.It is found that when different image splicing methods are used,namely up-down splicing,left-right splicing and 2&2 splicing methods,the effect of image splicing is different,and the accuracy and error are different.Among the three splicing methods,the 2&2 splicing method can effectively reduce the operation error,achieve a large range and high resolution interference pattern splicing,and has a broad application prospect in the white light interference three-dimensional topography characterization.

关 键 词：白光干涉仪 表面形貌 拼接方式 图像划分 

分 类 号：TN253[电子电信—物理电子学]