用于宽谱光学耦合的CdTe纳米线与硅波导复合耦合结构设计  

Design of CdTe Nanowire and Silicon Waveguide Composite Coupling Structure for Wide Spectrum Optical Coupling

作　　者：范长江 郭丽君 张云飞 李孟委 辛晨光[1,2] Fan Changjiang;Guo Lijun;Zhang Yunfei;Li Mengwei;Xin Chenguang(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051

出　　处：《微纳电子技术》2024年第5期66-73,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金(62005252)。

摘　　要：设计了一种基于CdTe纳米线与硅波导的复合光学耦合结构,利用光学绝热耦合实现了CdTe纳米线与片上硅波导的高效率、宽光谱耦合。采用时域有限差分法,研究了CdTe纳米线与硅波导的模式匹配情况,并建立了CdTe纳米线与硅波导复合结构的耦合理论模型。在实验中,将通过气相沉积法制备得到的CdTe纳米线与通过光刻工艺制备得到的硅波导组成复合耦合结构,并利用光谱仪测量耦合特性。实验结果表明,当CdTe纳米线与硅波导的耦合长度~10μm时,在波长1150~1650 nm范围内的耦合效率>90%,耦合带宽达到了500 nm。所提出的耦合结构具有耦合长度短、耦合带宽大、纳米线材料可选择性高、耦合结构可重复构建等特点,可用于片上波分复用器、集成光学传感器等光通信或光传感器件与系统的研制。A composite optical coupling structure based on CdTe nanowire and silicon waveguide was designed.The high efficiency and wide spectral coupling between CdTe nanowire and silicon waveguide on chip was realized by means of optical adiabatic coupling.The mode matching between CdTe nanowire and silicon waveguide was studied by using finite-difference time-domain method,and the coupling theory model of composite structure of CdTe nanowire and silicon waveguide was established.In the experiment,CdTe nanowires prepared by vapor deposition method and silicon waveguide prepared by photolithography were combined to form a composite coupling structure,and the coupling characteristics were measured by spectrometer.The experimental results show that when the coupling length between CdTe nanowires and silicon waveguide is~10μm,the coupling efficiency is>90%and the coupling bandwidth reaches 500 nm in the wavelength range of 1150-1650 nm.The proposed coupling structure has the characteristics of short coupling length,large coupling bandwidth,high selectivity of nanowire materials,repeatable construction of coupling structure,etc.,and can be used in the development of optical communication or optical sensor components and systems such as on-chip wavelength division multiplexer and integrated optical sensor.

关 键 词：纳米线 硅波导 光学耦合 宽光谱 光通信 

分 类 号：TN256[电子电信—物理电子学] TN303