基于泰伯效应的差分双层光栅光学杠杆放大位移传感器  

Talbot Effect Based Displacement Sensor Using Optical-Lever Amplification of Differential Double-Layer Gratings

作　　者：牛仟起 范长江 李孟委 辛晨光[1,2] Niu Qianqi;Fan Changjiang;Li Mengwei;Xin Chenguang(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2024年第5期86-92,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62375247)。

摘　　要：研制了一种基于泰伯效应的差分双层光栅光学杠杆放大位移传感器。通过理论计算、仿真分析和实验测试,证明在差分双层光栅后面形成了一个多周期复合光场。当两个光栅之间发生相对位移时,该复合光场随输入位移同步发生移动。由于差分结构的光学杠杆效应导致复合光场,复合光场位移相对于实际输入位移会产生放大,结合电荷耦合器件(CCD)相机成像检测方式可实现纳米级输入位移的检测。实验系统差分光栅结构周期分别为1.49和1.71μm。经多次重复测试,复合光场放大周期为~11.6μm,放大因子为~7.8,实验分辨率达到~9.8 nm。受益于位移放大,该传感器满足了纳米级精密位移测量对小周期光学光栅和小尺寸CCD像元的高要求,在机械定位、半导体制造等领域展现出良好的应用前景。A displacement sensor using differential double-layer gratings and optical-lever amplification based on the Talbot effect was developed.Theoretical derivation,simulation analysis,and experimental testing demonstrate the formation of a multi-period composite optical field behind the differential double-layer gratings.When a relative displacement occurs between the two gratings,the composite optical field moves synchronously with the input displacement.Due to the optical-lever effect of the differential structure,the composite optical field undergoes amplification relative to the actual input displacement.By combining with charge coupled device(CCD)camera imaging detection,nanometer-level displacement detection can be achieved.The periodicities of the differential grating structures in the experimental system are 1.49μm and 1.71μm,respectively.Through repeated tests,the amplification period of the composite optical field is~11.6μm,the amplification factor is~7.8,and the experimental resolution reaches~9.8 nm.Benefiting from displacement amplification,this sensor meets the high requirements of nanometer-level precision displacement measurement for small-period optical gratings and small-sized CCD pixels,demonstrating promising application prospects in mechanical positioning,semiconductor manufacturing and other fields.

关 键 词：泰伯效应 光学杠杆 差分双层光栅 位移传感器 复合光场 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH822[自动化与计算机技术—控制科学与工程]