锥面镜气囊抛光压力场与速度场建模仿真与分析  

Modeling simulation and analysis of pressure field andvelocity field for bonnet polishing of conical mirror

作　　者：贺钊豪 樊炜[1] 海阔 臧仲明 HE Zhaohao;FAN Wei;HAI Kuo;ZANG Zhongming(Mechanical Manufacturing Process Research Institute of China Academy of Engineering Physics,Mianyang Sichuan 621900,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《杭州电子科技大学学报（自然科学版）》2024年第2期23-29,共7页Journal of Hangzhou Dianzi University：Natural Sciences

基　　金：装发部项目(211ZW22001);国家自然科学基金项目(61605182);中国工程物理研究院创新发展基金创新项目(K1267-2022-TCF)。

摘　　要：锥面镜是激光仪器不可或缺的核心光学元件,气囊抛光具有加工效率高、贴合度好的优势,被广泛应用于超精密加工工艺中,然而当前气囊抛光工艺仅限于平面或低陡度曲面,对于主曲率差异巨大、曲率畸变严重的锥面镜,尚未建立其表面去除机制的物理模型。由于锥面镜具有几何特异性,难以直接通过现有的仪器获得压力场分布。本文在切触点局部坐标系下采用有限元方法计算压力场,并计算了速度场分布,分析了沿母线不同位置和下压量变化时压力场、速度场和去除率的变化规律,实验证明,相比传统建模方法,本方法预测的去除函数与锥面实际去除函数轮廓误差降低了约12%,显示本文建模方法得到的结果与实际符合度更高。Conical mirror is an indispensable core optical element of laser instruments.Bonnet polishing has the advantages of high processing efficiency and good fitting,and is widely used in ultra-precision machining processes.Nevertheless,the current bonnet polishing process is limited to planar or low gradient surfaces.Due to large difference between principal curvatures and severe curvature distortion on the cone,the physical model of removal mechanism has not been established.Due to the geometrical specificity of the cone,it is difficult to obtain the pressure field distribution directly through the existing instruments.This paper uses the finite element method(FEM)to calculate the pressure field and the velocity field distribution under the local coordinate system at the contact position.The change laws of pressure field,velocity field and the removal rate at different positions of the conical mirror and different press amounts are analyzed.The experiments demonstrate that the proposed method yields about 12%less contour error between the deducted removal function and the practical one,compared with the conventional modelling method.That reveals the proposed model achieves more consistent result with the practical one.

关 键 词：锥面镜 气囊抛光 压力场 速度场 有限元方法 

分 类 号：TN248.1[电子电信—物理电子学] TN241