多负载环境下微加速度计的可靠性建模与分析  

Reliability Modeling and Analysis of Micro Accelerometers under Multi-load Environments

作　　者：关存贺 许高斌 蒋京奇 王焕章 陈兴 马渊明 GUAN Cunhe;XU Gaobin;JIANG Jingqi;WANG Huanzhang;CHEN Xing;MA Yuanming(School of Microelectronics,Hefei University of Technology,Hefei,230009;Anhui Engineering Research Center of Microelectronic Mechanical System,Hefei,230009)

机构地区：[1]合肥工业大学微电子学院,合肥230009 [2]安徽省微电子机械系统工程技术研究中心,合肥230009

出　　处：《中国机械工程》2024年第5期860-868,共9页China Mechanical Engineering

基　　金：国家重点研发计划(2022YFB3205903)。

摘　　要：针对多负载环境下微电子机械系统(MEMS)微加速度计易出现的敏感结构断裂及材料疲劳退化问题,提出了一种基于全概率理论的微加速度计可靠度预估模型。该模型结合齐次泊松过程和Wiener退化过程,分别表征单位时间内作用在微加速度计上的冲击载荷次数以及器件在振动负载下的疲劳退化过程,完成了微加速度计在广义极端冲击、广义δ-冲击和广义混合冲击条件下的可靠度建模。对比分析了三种模型预估的可靠度随时间的变化规律,分析得出,广义混合冲击模型的可靠度计算结果更具有指导意义。进一步对广义混合冲击模型进行参数敏感性分析,研究结果表明,冲击强度与冲击次数对微加速度计的可靠度具有显著影响。A reliability estimation model for micro-electro-mechanical system(MEMS)micro accelerometer was proposed based on the total probability theory under a multi-load environment,addressing issues related to sensitive structural fractures and material fatigue degradation.The model combined homogeneous Poisson processes and Wiener degradation processes to characterize the number of impact loads acting on the micro accelerometers within a unit time and the fatigue degradation process of the device under vibrational loads.The model accomplished reliability modeling for the micro accelerometers under generalized extreme impacts,generalizedδ-impacts and generalized mixed impact conditions.The reliabilities of the three models were compared and analyzed with time,and the results of reliability calculations from the generalized mixed impact model offer more valuable insights.Furthermore,a parameter sensitivity analysis of generalized mixed impact model shows that impact intensity and impact times have significant influences on the reliability of micro accelerometers.

关 键 词：微加速度计 多负载环境 可靠性 全概率理论 

分 类 号：TN406[电子电信—微电子学与固体电子学]