激光共焦干涉面形快速高精度自动测量  

Laser confocal interference surface rapid and high-precision automatic measurement

作　　者：赵家豪 杨帅 杨铮 崔健 邱丽荣[1] 赵维谦[1] ZHAO Jiahao;YANG Shuai;YANG Zheng;CUI Jian;QIU Lirong;ZHAO Weiqian(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院复杂环境智能感测技术工信部重点实验室,北京100081

出　　处：《光学精密工程》2024年第9期1320-1329,共10页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.U22A6006);民用航天技术预先研究项目(No.D020402)。

摘　　要：针对传统球面面形干涉测量中手动调整被测件姿态精度低、速度慢的问题,提出了激光共焦干涉面形快速高精度自动测量方法。该方法通过共焦精密定焦技术实现了对被测件共焦位置的高精度轴向定位;通过五维自动调整架对被测件进行姿态调整,实现了被测件的高精度横向定位;通过Zernike拟合对被测件进行精调以减小离焦误差和倾斜误差,实现了对干涉面形的零条纹调整。最终实现了激光共焦干涉面形自动测量。构建了激光共焦干涉面形测量系统,实验表明:该方法的面形测量结果与Zygo干涉仪的测量结果相差0.000 6λ,重复测量精度可达0.001 9λ,平均单次干涉面形测量时间为16.5 s,与手动调整至零条纹相比测量效率提高了1.56倍。该方法为干涉面形的快速高精度测量提供了一种有效的手段。Considering the low accuracy and slow speed of measuring objects with spherical surfaces using traditional interferometry due to manual adjustments,an automatic laser confocal interferometric method is proposed for rapid and high-precision measurement of surface shapes.This method utilizes precise confocal fixed-focus technology for accurate confocal axial positioning of the object.The object's posture is adjusted using a five-dimensional workbench.Zernike fitting is employed to minimize defocus and tilt errors,achiev⁃ing zero-order fringe adjustment and automatic determination of the surface shape.A laser confocal interfer⁃ometric measurement system was developed for this purpose.Experimental results show that the difference between the automatic interference measurement results and those of the Zygo interferometer is 0.0006λ,with a repeatability accuracy of 0.0019λ.The average measurement time for a single surface is 16.5 s,im⁃proving measurement efficiency by 1.56 times compared to manual adjustments.This method offers an effective solution for the rapid and precise measurement of interferometric surface shapes.

关 键 词：激光共焦测量 移相干涉 共焦法 姿态调整 Zernike拟合 自动测量 

分 类 号：TH741[机械工程—光学工程] TP394.1[机械工程—仪器科学与技术]