界面钻蚀主导的准各向异性湿法刻蚀法制备玻璃微棱镜阵列  

Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

作　　者：李菲尔 余佳珈 杜立群[1,2] 吴梦希 刘军山[1,2] LI Feier;YU Jiajia;DU Liqun;WU Mengxi;LIU Junshan(State Key Laboratory of High-performance Precision Manufacturing,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学高性能精密制造全国重点实验室,辽宁大连116024 [2]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《光学精密工程》2024年第9期1384-1394,共11页Optics and Precision Engineering

基　　金：国家重点研发计划资助项目(No.2022YFB3204600);大连理工大学医工交叉联合基金资助项目(No.DUT23YG215)。

摘　　要：玻璃微棱镜具有耐腐蚀、耐高温、寿命长等优点,但在玻璃上加工微棱镜阵列目前仍是一个难题。因此,提出了界面钻蚀主导的玻璃准各向异性湿法刻蚀方法,制备了高质量的微棱镜阵列器件。在元胞自动机中引入界面性质调控,模拟了界面钻蚀与各向同性侧蚀的竞争行为,探究了刻蚀横截面形貌的变化规律,构建了准各向异性湿法刻蚀模型。在此指导下,加工了横截面为梯形的微结构,设计并制备了间距、形状、尺寸均可调控的微棱镜阵列,重复性达到98%。验证了微棱镜阵列对LED灯扩散效果,光亮度提升了4.6倍。本文改变了传统玻璃湿法刻蚀各向同性的固有认识,创新性地开发了准各向异性刻蚀工艺,为玻璃微棱镜阵列等相关器件提供了高效低成本的制备方法。Microprism arrays are extensively utilized across various industries.Glass-based microprisms,in comparison to polymers,offer superior corrosion resistance,thermal stability,and durability.However,the isotropic nature of glass makes micromachining into prism-like structures challenging.In this paper,we introduce a novel interfacial erosion-induced quasi-anisotropic wet etching technique to manufacture glass microprism arrays efficiently and cost-effectively.For the first time,interfacial erosion is analyzed within a metacellular automaton to study the wet etching process,uncovering the dynamics between side etching and interfacial erosion and their impact on the side wall profiles.This approach yields varied microstructures with tilted morphologies.Leveraging quasi-anisotropic etching characteristics,we successfully pro⁃duce microprism arrays with adjustable spacing,shape,and size,achieving 98%repeatability between ar⁃rays.Our method significantly enhances LED lamp diffusion,increasing average brightness by 4.6 times.This research not only pioneers a new direction in glass wet etching but also incorporates quasi-anisotropic properties into the traditional isotropic framework,presenting a straightforward,economical technique for fabricating glass microprism arrays and similar devices.

关 键 词：微棱镜 湿法刻蚀 硼硅玻璃 界面钻蚀 准各向异性刻蚀 

分 类 号：TN215[电子电信—物理电子学] TN03