辉光放电质谱法在高纯碳化硅原料及制品的微量杂质成分测定中的应用  

Application of GDMS in the determination of trace impurities in SiC raw materials and products with high purity

作　　者：郑翰 相宇博 曹会彦[1] 石会营[1,2] 龚剑锋 吴吉光[1] 马昭阳 Zheng Han;Xiang Yubo;Cao Huiyan;Shi Huiying;Gong Jianfeng;Wu Jiguang;Ma Zhaoyang(State Key Laboratory of Advanced Refractory Materials of Si nosteel Luoyang Institute of Refractories Research Co.,Ltd.,Luoyang 471039,China;Sinosteel Ningxia Naiyan Binhe New Material Co.,Ltd.,Pingluo 753400,China)

机构地区：[1]中钢集团洛阳耐火材料研究院有限公司先进耐火材料国家重点实验室,洛阳471039 [2]中钢宁夏耐研滨河新材料有限公司,平罗753400

出　　处：《耐火与石灰》2024年第3期15-19,共5页Refractories & Lime

基　　金：宁夏回族自治区重点研发计划(2022BFE01003)。

摘　　要：将辉光放电质谱法(GDMS)用于高纯碳化硅原料和制品中微量杂质成分的检测,结果发现:1)GDMS法比化学分析法对Fe、Al杂质检出限更低,含量的检测结果更准确,检测精密度更高;2)无烟煤及石油焦作为碳源制备的碳化硅均含有较多的Fe、Al杂质,无烟煤碳化硅中含Ca元素较多,石油焦碳化硅中含V元素也较多。碳化硅颗粒研磨成微粉过程会引入Fe、Cr、Mn、Ti等杂质;3)Al元素在SiC中多以Al_(2)O_(3)、AlN存在,酸碱清洗、除杂过程很难将其除去,用GB/T 3045—2017化学分析法对Al元素的检测结果会严重偏低。With the application of GDMS in the determination of trace impurities in SiC raw materials and products with high purity,the results are as follows:1)compared with chemical analysis,the GDMS method has lower determination limits for the impurities of Fe and Al,more accurate determination of content,and higher determination precision;2)the SiC prepared by using anthracite and petroleum coke as carbon source contains more Fe and Al.In addition,the anthracite contains more Ca,while the petroleum coke contains more V.Impurities such as Fe,Cr,Mn,Ti will be introduced when SiC particles are ground into micro powders;3)considering that Al is mainly present in the form of Al_(2)O_(3)and AlN in SiC,it is difficult to remove it through acid and alkali cleaning or impurity removal process,therefore the determination result of Al by using chemical analysis of GB/T 3045—2017 is seriously low.

关 键 词：辉光放电质谱法 碳化硅 无烟煤 石油焦 

分 类 号：TQ175.66[化学工程—硅酸盐工业]